Accuracy improvement of 5 point MEMS displacement sensor device for planar form measurement by using SOI wafer

2019 ◽  
Vol 2019.72 (0) ◽  
pp. A44
Author(s):  
Kenya SUGITA ◽  
Tetsuya MATSUMOTO ◽  
Yuma TAMARU ◽  
Hiroki SHIMIZU
Keyword(s):  
Displacement Sensor ◽  
Accuracy Improvement ◽  
Sensor Device ◽  
Planar Form

Accuracy Improvement of Terminal Voltage Self-coupled Laser Distance Sensor

2020 ◽  
Vol 140 (11) ◽  
pp. 1264-1269
Author(s):  
Tatsuya Ohba ◽  
Daisuke Mizushima ◽  
Keishiro Goshima ◽  
Norio Tsuda ◽  
Jun Yamada
Keyword(s):  
Accuracy Improvement ◽  
Terminal Voltage ◽  
Laser Distance Sensor ◽  
Distance Sensor

Output Voltage Characteristics of Eddy Current Displacement Sensor for Various Heat Treatments of Measuring Objects

2008 ◽  
Vol 128 (4) ◽  
pp. 289-297 ◽  
Author(s):  
Tsutomu Mizuno ◽  
Shigemi Enoki ◽  
Takashi Asahina ◽  
Takayuki Suzuki ◽  
Hiroyuki Maeda ◽  
...  
Keyword(s):  
Eddy Current ◽  
Output Voltage ◽  
Heat Treatments ◽  
Displacement Sensor

A Study of a Next Day Electric Load Curve Forecasting Method and its Accuracy Improvement

2014 ◽  
Vol 134 (1) ◽  
pp. 9-15 ◽  
Author(s):  
Hisatomo Miyata ◽  
Kazutoshi Miyashita ◽  
Takayuki Endo ◽  
Yuichi Shimasaki ◽  
Tatsuya Iizaka ◽  
...  
Keyword(s):  
Electric Load ◽  
Load Curve ◽  
Accuracy Improvement ◽  
Forecasting Method

Temperature Invariant Phenomenon in Dual Coil Eddy Current Displacement Sensor: Investigation, Verification and Application

2019 ◽  
Vol 19 (21) ◽  
pp. 9680-9687 ◽  
Author(s):  
Yating Yu ◽  
Hanchao Li ◽  
Ke Xue ◽  
Dahuan Liu ◽  
Geng Gao
Keyword(s):  
Eddy Current ◽  
Displacement Sensor
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