Molecular Dynamics Study of Si Thin Film Formation Process Using Reactive Force-Field
2019 ◽
Vol 2019
(0)
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pp. J05411
Keyword(s):
Keyword(s):
2005 ◽
Vol 276
(1-2)
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pp. 281-288
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2019 ◽
Vol 151
(9)
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pp. 094503
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2020 ◽
Vol 167
(10)
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pp. 100555
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2019 ◽
Vol 103
(3)
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pp. 1600-1614
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