Molecular Dynamics Study of the Thin Film Formation Process

1991 ◽  
Vol 6 (4-6) ◽  
pp. 333-342 ◽  
Author(s):  
Yasushi Sasajima ◽  
Koichi Suzuki ◽  
Satoru Ozawa ◽  
Ryoichi Yamamoto
Keyword(s):  
Thin Film ◽  
Molecular Dynamics ◽  
Formation Process ◽  
Film Formation ◽  
Thin Film Formation

Molecular Dynamics Study of Si Thin Film Formation Process Using Reactive Force-Field

2019 ◽  
Vol 2019 (0) ◽  
pp. J05411
Author(s):  
Naoya UENE ◽  
Takuya MABUCHI ◽  
Masaru ZAITSU ◽  
Shigeo YASUHARA ◽  
Takashi TOKUMASU
Keyword(s):  
Thin Film ◽  
Molecular Dynamics ◽  
Force Field ◽  
Formation Process ◽  
Film Formation ◽  
Reactive Force ◽  
Reactive Force Field ◽  
Thin Film Formation ◽  
Si Thin Film

scholarly journals Computer Simulation Method of Thin Film Formation Process.

Materia Japan ◽  
1996 ◽  
Vol 35 (4) ◽  
pp. 386-392
Author(s):  
Mizuki Iwanami ◽  
Kentaro Kyuno ◽  
Ryoichi Yamamoto
Keyword(s):  
Thin Film ◽  
Computer Simulation ◽  
Formation Process ◽  
Film Formation ◽  
Simulation Method ◽  
Computer Simulation Method ◽  
Thin Film Formation
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