scholarly journals 7AM2-D-1 Fabrication of Quartz Crystal Resonator Load Sensor based on MEMS Technology

2013 ◽  
Vol 2013.5 (0) ◽  
pp. 255-256
Author(s):  
Yuichi Murozaki ◽  
Fumihito Arai
Keyword(s):  
Quartz Crystal ◽  
Quartz Crystal Resonator ◽  
Crystal Resonator ◽  
Load Sensor ◽  
Mems Technology

Design and Characterization of Load Sensor with AT-Cut QCR for Miniaturization and Resolution Improvement

2010 ◽  
Vol 22 (3) ◽  
pp. 286-292 ◽  
Author(s):  
Keisuke Narumi ◽  
◽  
Toshio Fukuda ◽  
Fumihito Arai ◽  
Keyword(s):  
High Speed ◽  
Quartz Crystal ◽  
High Sensitivity ◽  
Measurement Range ◽  
Quartz Crystal Resonator ◽  
Load Measurement ◽  
Crystal Resonator ◽  
Load Sensor ◽  
Frequency Changes ◽  
Quartz Crystal Resonators

The compact load sensor we developed uses an AT-cut quartz crystal resonator whose resonance frequency changes under external load, featuring high sensitivity, high-speed response, and a wide measurement range – plus superior temperature and frequency stability. The vulnerability of previous quartz crystal resonators to stress concentration in bending prevented them from being more widely applied to load measurement. The sensor we developed maintains the quartz crystal resonator safely. Our objective here is to improve load measurement resolution and to miniaturize the sensor, which we did designing novel retention of the quartz crystal resonator fixed vertical to applied load. The new load sensor’s resolution is 3.21 mN –seven times better than conventional load sensors.

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