Design and Characterization of Load Sensor with AT-Cut QCR for Miniaturization and Resolution Improvement

2010 ◽  
Vol 22 (3) ◽  
pp. 286-292 ◽  
Author(s):  
Keisuke Narumi ◽  
◽  
Toshio Fukuda ◽  
Fumihito Arai ◽  
Keyword(s):  
High Speed ◽  
Quartz Crystal ◽  
High Sensitivity ◽  
Measurement Range ◽  
Quartz Crystal Resonator ◽  
Load Measurement ◽  
Crystal Resonator ◽  
Load Sensor ◽  
Frequency Changes ◽  
Quartz Crystal Resonators

The compact load sensor we developed uses an AT-cut quartz crystal resonator whose resonance frequency changes under external load, featuring high sensitivity, high-speed response, and a wide measurement range – plus superior temperature and frequency stability. The vulnerability of previous quartz crystal resonators to stress concentration in bending prevented them from being more widely applied to load measurement. The sensor we developed maintains the quartz crystal resonator safely. Our objective here is to improve load measurement resolution and to miniaturize the sensor, which we did designing novel retention of the quartz crystal resonator fixed vertical to applied load. The new load sensor’s resolution is 3.21 mN –seven times better than conventional load sensors.

Compact Force Sensor Using AT-Cut Quartz Crystal Resonator Supported by Novel Retention Mechanism

2009 ◽  
Vol 21 (2) ◽  
pp. 260-266 ◽  
Author(s):  
Keisuke Narumi ◽  
◽  
Ayumi Asakura ◽  
Toshio Fukuda ◽  
Fumihito Arai ◽  
...  
Keyword(s):  
External Force ◽  
High Speed ◽  
Quartz Crystal ◽  
Force Measurement ◽  
Force Sensor ◽  
Retention Mechanism ◽  
Sensor Output ◽  
Quartz Crystal Resonator ◽  
Crystal Resonator ◽  
Frequency Changes

The compact force sensor we developed uses an AT-cut quartz crystal resonator whose resonance frequency changes under external force, and features high sensitivity, high-speed response, a wide measurement range, and superior temperature and frequency stability. Quartz crystal resonators were rarely used in force measurement due to their poor stress concentration during bending. The objective of this study was to construct a sensor mechanism that safely maintains the quartz crystal resonator under external force. We designed and analyzed the novel retention mechanism of the quartz crystal resonator. The proposed structure is flat, small, and sensitive. Moreover, we designed and produced a compact case for mounting the retention mechanism. Sensor output is expected to be changed by thermal expansion, so we evaluated the temperature characteristics of the assembled sensor, finding the relationship of the temperature and sensor output to be linear and temperature easily compensated for.

Research on Character of Integrated Quartz Crystal Resonators

2011 ◽  
Vol 382 ◽  
pp. 159-162 ◽  
Author(s):  
Wen Jie Tian ◽  
You Bin Sun ◽  
Hong Yun Zhou ◽  
Gui Feng Dong
Keyword(s):  
Quartz Crystal ◽  
Research Result ◽  
Difference Frequency ◽  
Frequency Variation ◽  
Quartz Crystal Resonator ◽  
Crystal Resonator ◽  
Crystal Substrate ◽  
Mixing Frequency ◽  
Quartz Crystal Resonators ◽  
Crystal Wafer

The force sensitive characteristic of integrated quartz crystal resonator assembled on one quartz crystal substrate with a certain radial direction force are studied, and it is also studied that the force sensitive characteristic of output frequency which is the mixing frequency by resonant frequency corresponded to the resonators in the different position of the same quartz crystal wafer outputted in difference frequency way. The research result shows the force sensitive characteristic of AT-cut integrated three-electrode quartz crystal resonator outputted in difference frequency way is 1.3 times of that of the traditional single-electrode resonator. The force sensitive characteristic of the integrated four-electrode resonator is a little bit smaller, but two sets of output can be obtained at the same time. The frequency stability of all integrated quartz resonator can get to the magnitude of 10-10 and relative frequency variation is about ±5ppm in the range of -50°C to 60°C.

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