scholarly journals 5PM3-PMN-025 Development of high vacuum flash evaporation equipment for deposition of shape memory alloy thick film

Author(s):  
Takahiro Kamada ◽  
Takashi Mineta
Author(s):  
Fabrizio Niccoli ◽  
Valentina Giovinco ◽  
Cedric Garion ◽  
Carmine Maletta ◽  
Paolo Chiggiato

Recent studies on Shape Memory Alloy rings have been undertaken at the European Organization for Nuclear Research (CERN) to develop smart and leak-tight couplers for Ultra High Vacuum systems of particle accelerators. A special thermo-mechanical process (training) is needed to provide SMA rings with proper functional properties, that is to allow thermal mounting, dismounting, and leak tight coupling within a given service temperature window. Low temperature ring expansion is a crucial part of the training process as it gives suitable size, shape recovery properties, and thermal stability range to the SMA element. An analytical model, based on simplified elastic-plastic axisymmetric concepts, has been developed and implemented in a commercial software to simulate isothermal SMA rings expansions. It is particularly useful to predict the final size of a martensitic SMA coupler as a function of the initial dimensions and of the pre-deformation parameters. The effectiveness of the model has been demonstrated by analyzing the stress/deformation field occurring in a wide range of ring geometries for different load cases including martensite reorientation and plasticity. The predictions of the analytical model have been systematically compared with those obtained by axisymmetric finite element (FE) analyses based on elastic-plastic constitutive models and experimental measurements.


1999 ◽  
Author(s):  
John J. Gill ◽  
Ken Ho ◽  
Gregory P. Carman

Abstract Thin film SMA (Shape memory alloy) is a useful method for MEMS (Microelectromechanical Systems) actuator. This is because the thin film has an improved frequency response compared to bulk SMA, high work density, and produces large strain. A novel two-way thin film NiTi (Nickel Titanium) shape memory alloy actuator is presented in this paper. Thin film shape memory alloy is sputter-deposited onto a silicon wafer in an ultra high vacuum system. Transformation temperatures of the deposited NiTi film are measured by residual stress measurement at temperatures from 25 ° C to 120 ° C. Test results show that the Mf (Martensite Finish Temperature) is around 60 ° C and Af (Austenite Finish Temperature) is around 110 ° C. A free standing NiTi membrane (10 mm × 10mm and 3 μm thick) is fabricated using MEMS technology. We found that a mixture of HF (Hydro Fluidic Acid), HNO3 (Nitric Acid) and DI (Deionized) water with thick photo resist mask works best for the fabrication process. The membrane is hot-shaped in different shapes such as dome shape, pyramidal shape, and cylindrical shape. Results indicate that when the temperature of the NiTi film exceeds Af, the NiTi membrane transforms into the trained hot-shape. When the temperature cools down to room temperature, the membrane returns to the initial flat shape.


2000 ◽  
Author(s):  
John J. Gill ◽  
Gregory P. Carman

Abstract Thin film SMA (Shape memory alloy) is a useful material for MEMS (Microelectromechanical Systems) actuator. This is because the thin film has an improved frequency response compared to bulk SMA, high work density, and produces large strain. A novel two-way thin film NiTi (Nickel Titanium) shape memory alloy actuator is presented in this paper. Thin film shape memory alloy is sputter-deposited onto a silicon wafer in an ultra high vacuum system. Transformation temperatures of the NiTi film are determined by measuring the residual stress as a function of temperature. Test results show that the Martensite-Temperature-Finish (Mf) is approximately 60° C, and the Austenite-Temperature-Finish (Af) is 110° C. A free standing NiTi membrane (12 mm × 12 mm and 2.5 μm thick) is fabricated using MEMS technology. We found that a mixture of HF (Hydro Fluoric Acid), HNO3 (Nitric Acid) and DI (Deionized) water with thick photo resist mask works best for the fabrication process. The membrane is hot-shaped into a dome shape. Results indicate that when the temperature of the NiTi film exceeds Af, the NiTi membrane transforms into the trained hot-shape. When the temperature cools down to room temperature, the membrane returns to the initial flat shape. The performance of the SMA micro actuator is characterized with a laser measurement system for deflection vs. input power and frequency response. The maximum deflection of SMA microactuator is 230 μm. The corresponding frequency responses at the maximum deflection are 30 Hz with Copper (Cu) block placed underneath the microactuator and less than 1 Hz when Plexi-glass is placed.


2019 ◽  
Vol 139 (9) ◽  
pp. 329-334
Author(s):  
Yusuke Kimura ◽  
Kazuki Tsuji ◽  
Hiroshi Yanatori ◽  
Konomu Abe ◽  
Kenji Iwasaki ◽  
...  

2019 ◽  
Vol 28 (8) ◽  
pp. 085023
Author(s):  
F Niccoli ◽  
C Garion ◽  
C Maletta ◽  
C Cangialosi ◽  
A Infantino ◽  
...  

2009 ◽  
Vol 86 (4-6) ◽  
pp. 1274-1277 ◽  
Author(s):  
Takashi Mineta ◽  
Kouji Kasai ◽  
Yuki Sasaki ◽  
Eiji Makino ◽  
Takahiro Kawashima ◽  
...  

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