scholarly journals Measurement Method of Plating Current for LSI Wafer by Using Magnetic Sensors

2007 ◽  
Vol 73 (730) ◽  
pp. 709-715 ◽  
Author(s):  
Yoshinao KISHIMOTO ◽  
Kenji AMAYA
Author(s):  
Haoyang Fan ◽  
Qi Huang ◽  
Zhenyuan Zhang ◽  
Shi Jing ◽  
Kaiji Liao ◽  
...  

Author(s):  
Jing Yu ◽  
Xiongzhu Bu ◽  
Chao Xiang ◽  
Bo Yang

Concerning on the problem of low measuring precision of the current micro-inertial sensors, a novel attitude measurement method is proposed to dismiss the drift for remarkable attitude error. According to the output of the onboard three-axis magnetic sensor in the process of projectile flight, a low-cost attitude detection system is designed by using the intersection ratio of the sensor. First, the output model of the onboard three-axis magnetic sensor is established. The mathematical relationship between the characteristic ratio of magnetic sensor output and the pitch angle is then derived. Then, the solution and correction algorithm of the attitude angles are studied. Finally, the effectiveness of the attitude measurement method has been validated by carrying out the semi-physical experiments. The experimental results indicate that the error of attitude angles is within ±1° and the attitude angle error of the combined magnetic sensors is not cumulative. Meanwhile, the geomagnetic field strength is dispensable during the whole calculation process. Compared with the “Zero Crossing Method”, the proposed method has shown a nearly two-times higher accuracy and has no limitation of “MAGSONDE window”. What is more, this method proves to be more simple and has a doubled update rate in attitude angle calculation.


AIP Advances ◽  
2022 ◽  
Vol 12 (1) ◽  
pp. 015301
Author(s):  
Xiaofeng Liu ◽  
Yuehua Chen ◽  
Haigang Hu ◽  
Shaoyu Feng ◽  
Zhimin Feng

2020 ◽  
pp. 35-42
Author(s):  
Yuri P. Zarichnyak ◽  
Vyacheslav P. Khodunkov

The analysis of a new class of measuring instrument for heat quantities based on the use of multi-valued measures of heat conductivity of solids. For example, measuring thermal conductivity of solids shown the fallacy of the proposed approach and the illegality of the use of the principle of ambiguity to intensive thermal quantities. As a proof of the error of the approach, the relations for the thermal conductivities of the component elements of a heat pump that implements a multi-valued measure of thermal conductivity are given, and the limiting cases are considered. In two ways, it is established that the thermal conductivity of the specified measure does not depend on the value of the supplied heat flow. It is shown that the declared accuracy of the thermal conductivity measurement method does not correspond to the actual achievable accuracy values and the standard for the unit of surface heat flux density GET 172-2016. The estimation of the currently achievable accuracy of measuring the thermal conductivity of solids is given. The directions of further research and possible solutions to the problem are given.


2015 ◽  
Vol 135 (11) ◽  
pp. 1349-1350
Author(s):  
Kazuhiro Suzuki ◽  
Noboru Nakasako ◽  
Masato Nakayama ◽  
Toshihiro Shinohara ◽  
Tetsuji Uebo

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