Optical characterization of a four-medium thin film structure by real time spectroscopic ellipsometry: amorphous carbon on tantalum
Keyword(s):
2006 ◽
Vol 15
(4-8)
◽
pp. 1015-1018
◽
Keyword(s):
Keyword(s):
2001 ◽
Vol 87
(1)
◽
pp. 1-22
◽
Keyword(s):
2013 ◽
Vol 334-335
◽
pp. 294-296
◽
Keyword(s):
Keyword(s):
1991 ◽
Vol 206
(1-2)
◽
pp. 374-380
◽
Keyword(s):
Keyword(s):
2004 ◽
Vol 239
(1)
◽
pp. 79-86
◽