Real time spectroscopic ellipsometry for characterization of thin film optical properties and microstructural evolution
1991 ◽
Vol 206
(1-2)
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pp. 374-380
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Keyword(s):
Keyword(s):
Keyword(s):
1991 ◽
pp. 33-40
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Keyword(s):
2002 ◽
Vol 20
(4)
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pp. 1395-1407
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Keyword(s):
Keyword(s):
2004 ◽
Vol 82
(1-2)
◽
pp. 187-199
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