Comparison of plasma-effect in different InP-based VCSELs
Keyword(s):
Deposition of SiOx coatings by inductively coupled plasma: Effect of pulsed hexamethyldisiloxan flow
2018 ◽
Vol 15
(4)
◽
pp. 1700186
◽
2019 ◽
Vol 490
◽
pp. 266-277
◽
2013 ◽
Vol 36
(9)
◽
pp. 1420-1427
◽
2000 ◽
Vol 6
(2)
◽
pp. 71-76
◽