Enhancement of UV laser induced etching of diamond under vacuum

Author(s):  
C. G. Baldwin ◽  
J. E. Downes ◽  
R. P. Mildren
1992 ◽  
Vol 192 (2-3) ◽  
pp. 265-270 ◽  
Author(s):  
Q.Z. Qin ◽  
P.H. Lu ◽  
Z.J. Zhuang ◽  
Q.K. Zheng

1988 ◽  
Vol 129 ◽  
Author(s):  
George W. Tyndall ◽  
Christopher R. Moylan

ABSTRACTA quartz crystal microbalance (QCM) has been used to study the 248 nm laser-induced etching of nickel by Br2. The experiment consists of focusing a pulsed UV laser beam at normal incidence onto the surface of a quartz crystal coated with 1μm of polycrystalline nickel. Absolute etch rates of nickel, in terms of mass removed per unit time, are determined from the integrated sensitivity function of the 6Mhz crystals used in this work. The dependence of the etch rate on Br2 pressure and laser fluence was measured. The kinetic data obtained from these measurements show that the mechanism of the etching process is dominated by the formation and the subsequent removal of a NixBry monolayer.


1989 ◽  
Vol 158 ◽  
Author(s):  
George W. Tyndall

ABSTRACTThe 248 nm excimer laser-induced etching of Ti, Cr, Fe, Co, Ni, and Cu by Br2 has been studied. The experiment consists of focusing the pulsed UV laser beam at normal incidence onto the surface of a quartz crystal microbalance (QCM) coated with 1μm of polycrystalline metal. Absolute etch rates are determined as a function of the Br2 pressure and the laser fluence. On the basis of the kinetic information, four mechanisms are proposed to explain the etching of these transition metals.


2020 ◽  
Vol 117 (11) ◽  
pp. 111601 ◽  
Author(s):  
C. G. Baldwin ◽  
J. E. Downes ◽  
R. P. Mildren

1999 ◽  
Vol 138-139 ◽  
pp. 613-616 ◽  
Author(s):  
J Békési ◽  
K Kordás ◽  
Cs Beleznai ◽  
K Bali ◽  
R Vajtai ◽  
...  

2009 ◽  
Vol 00 (00) ◽  
pp. 090915102728058-8
Author(s):  
Yoshiteru Kato ◽  
Yasuhiko Nakashima ◽  
Naoki Shino ◽  
Koichi Sasaki ◽  
Akihiro Hosokawa ◽  
...  

1984 ◽  
Vol 45 (C8) ◽  
pp. C8-305-C8-308 ◽  
Author(s):  
F. Cottet ◽  
M. Hallouin ◽  
J. P. Romain ◽  
R. Fabbro ◽  
B. Faral
Keyword(s):  

2011 ◽  
Vol E94-C (12) ◽  
pp. 1858-1860
Author(s):  
Soichi KOBAYASHI ◽  
Seigi OKI ◽  
Takahiro ISHIKURA ◽  
Keisuke KATO ◽  
Toshihiro SUDA
Keyword(s):  
Uv Laser ◽  

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