laser induced etching
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Author(s):  
T. O. Lipatieva ◽  
A. S. Lipatiev ◽  
Y. V. Kulakova ◽  
S. V. Lotarev ◽  
S. S. Fedotov ◽  
...  

2021 ◽  
Vol 9 (1) ◽  
Author(s):  
Jeongtae Kim ◽  
Sung-Il Kim ◽  
Yeun-Ho Joung ◽  
Jiyeon Choi ◽  
Chiwan Koo

AbstractWe demonstrate a two-step hybrid process for fabricating movable parts inside glass substrate using the selective laser-induced etching (SLE) process that is consisted of laser-direct writing and wet chemical etching. To obtain an influence by the optical characteristics of a glass substrate when fabricating a 3D microstructure using the SLE, we analyzed the relationship of their dimensions between the designed and the fabricated devices. Two 3D microfluidic devices are designed and fabricated on glass substrates as the demonstrations of the hybrid process: a 3D microfluidic valve device with a movable plug and a 3D microfluidic mixer with a rotatable impeller and multilayer microchannels. The valving plug and the impeller of each device are successfully moved and rotated. The smallest structure is a pillar of the impeller device, and its size is 29 μm (diameter) × 277 μm (height). We expect this study to be extended to potential applications in 3D glass microfabrication and microfluidic systems.


Micromachines ◽  
2021 ◽  
Vol 12 (2) ◽  
pp. 144
Author(s):  
Jonghun Kim ◽  
Kwang H. Oh

The variation in cross-sectional profile of a microgroove fabricated with focused and diverging laser irradiation is demonstrated with ray tracing. To verify the result of ray tracing, stainless-steel 304 microgrooves were manufactured utilizing the conventional lens-based and optical fiber-based laser-induced etching techniques in phosphoric acid solution. Three distinctive groove geometries, i.e., a flat surface with no groove, an intermediate stage groove, and a fully developed V-groove, were rendered for numerical analysis. For focusing mode, the first and second reflections were caused by high laser intensity and the second reflected beam could lead to variation in the groove shape such as a U-shaped groove or a V-shaped groove in accordance with etchant concentration. On the contrary, a weak laser entirely distributed at the groove sidewall could not induce a chemical reaction, leading to a V-shaped groove. The effect of process variables such as laser power (intensity) and etchant concentration on the cross-sectional profiles of a groove are closely examined through the computed simulation results.


2020 ◽  
Vol 117 (11) ◽  
pp. 111601 ◽  
Author(s):  
C. G. Baldwin ◽  
J. E. Downes ◽  
R. P. Mildren

2020 ◽  
Vol 61 (9) ◽  
Author(s):  
Francisco Pimenta ◽  
Kazumi Toda-Peters ◽  
Amy Q. Shen ◽  
Manuel A. Alves ◽  
Simon J. Haward

Abstract We employ a state-of-the-art microfabrication technique (selective laser-induced etching) to fabricate a set of axisymmetric microfluidic geometries featuring a 4:1 contraction followed by a 1:4 downstream expansion in the radial dimension. Three devices are fabricated: the first has a sudden contraction followed by a sudden expansion, the second features hyperbolic contraction and expansion profiles, and the third has a numerically optimized contraction/expansion profile intended to provide a constant extensional/compressional rate along the axis. We use micro-particle image velocimetry to study the creeping flow of a Newtonian fluid through the three devices and we compare the obtained velocity profiles with finite-volume numerical predictions, with good agreement. This work demonstrates the capability of this new microfabrication technique for producing accurate non-planar microfluidic geometries with complex shapes and with sufficient clarity for optical probes. The axisymmetric microfluidic geometries examined have potential to be used for the study of the extensional properties and non-linear dynamics of viscoelastic flows, and to investigate the transport and deformation dynamics of bubbles, drops, cells, and fibers. Graphic abstract


2019 ◽  
Vol 7 (1) ◽  
Author(s):  
Sungil Kim ◽  
Jeongtae Kim ◽  
Yeun-Ho Joung ◽  
Sanghoon Ahn ◽  
Jiyeon Choi ◽  
...  

Abstract We present the selective laser-induced etching (SLE) process and design guidelines for the fabrication of three-dimensional (3D) microfluidic channels in a glass. The SLE process consisting of laser direct patterning and wet chemical etching uses different etch rates between the laser modified area and the unmodified area. The etch selectivity is an important factor for the processing speed and the fabrication resolution of the 3D structures. In order to obtain the maximum etching selectivity, we investigated the process window of the SLE process: the laser pulse energy, pulse repetition rate, and scan speed. When using potassium hydroxide (KOH) as a wet etchant, the maximum etch rate of the laser-modified glass was obtained to be 166 μm/h, exhibiting the highest selectivity about 333 respect to the pristine glass. Based on the optimized process window, a 3D microfluidic channel branching to three multilayered channels was successfully fabricated in a 4 mm-thick glass. In addition, appropriate design guidelines for preventing cracks in a glass and calibrating the position of the dimension of the hollow channels were studied.


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