To improve the power of reference wavefront generated by reference wavefront source (RWS) based on silicon nitride (SiN) waveguide in point diffraction interferometer (PDI), we design the Y-branch coupler and grating coupler, and then compare the maximum coupling efficiency, 3 dB fabrication tolerance, 3 dB alignment tolerance and polarization dependent loss of two couplers. Our results show that grating coupler has higher coupling efficiency, lower etching difficulty and alignment difficulty, while Y-branch coupler has lower coating difficulty. To get the maximum efficiency, mode in the fiber must be TE mode no matter for grating coupler or Y-branch coupler. This paper improves the power of the wavefront by selecting appropriate fiber-to-waveguide couplers for waveguide RWS. PDI based on the power improved waveguide RWS is expected to be used in many measurement fields.
High-Efficiency Grating Coupler in 400 nm and 500 nm PECVD Silicon Nitride With Bottom Reflector
