Study of the resolution of direct recording of submicron structures on titanium films using millisecond laser pulses

2019 ◽  
Vol 86 (4) ◽  
pp. 251 ◽  
Author(s):  
E. A. Shakhno ◽  
K. Z. Nguyen
2017 ◽  
Vol 18 (3) ◽  
pp. 309-312
Author(s):  
O.Yu. Bonchyk ◽  
S.G. Kiyak ◽  
I.A. Mohylyak ◽  
D.I. Popovych

The experimental studies of geometry features of silicon layers in areas of second and millisecond laser pulses were carried out. The results of microscopic studies of periodic structures that are formed on the surfaces with crystallographic orientation (111) (110) (100) and on planes, cut at an angle of 6° to the plane (100) and amorphous layers В2О3 deposited on the surface of silicon were presented. The results can be used to determine the crystallographic orientation of the semiconductor surface and express assessment of disorientation degree of crystal surface.


Author(s):  
C.A. Conti ◽  
C.J. Doherty ◽  
K.C.R. Chiu ◽  
T.T. Sheng ◽  
H.J. Leamy

1976 ◽  
Vol 6 (7) ◽  
pp. 850-853 ◽  
Author(s):  
Nikolai E Kask ◽  
L S Kornienko ◽  
V V Radchenko ◽  
Gennadii M Fedorov ◽  
D B Chopornyak

1998 ◽  
Vol 28 (11) ◽  
pp. 997-1001
Author(s):  
Sergei V Vasil'ev ◽  
V V Voina ◽  
A Yu Ivanov ◽  
V A Liopo

2014 ◽  
Vol 56 (12) ◽  
pp. 1357-1362 ◽  
Author(s):  
É. D. Aluker ◽  
A. S. Zverev ◽  
A. G. Krechetov ◽  
A. Yu. Mitrofanov ◽  
A. O. Terent’eva ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document