Optical Fourier transform based in-plane vibration characterization for MEMS comb structure
2013 ◽
Vol 21
(4)
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pp. 5063
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Yongfeng Gao
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Liangcai Cao
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Zheng You
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Jiahao Zhao
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Zichen Zhang
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...
1972 ◽
Vol 11
(6)
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pp. 1425
2000 ◽
Vol 39
(35)
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pp. 6573
Pierre M. Lane
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Michael Cada
Santiago Tainta
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Maria J. Erro
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Maria J. Garde
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Waldimar Amaya
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Salvador Sales
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...
1989 ◽
Vol 38
(10)
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pp. 1723
CHEN YAN-SONG
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ZHENG SHI-HAI
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MA XUE-BING
H. W. Siesler
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G. G. Hoffmann
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O. Kolomiets
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F. Pfeifer
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M. Zahedi
1996 ◽
Vol 36
(1)
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pp. 87-94
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I. Zebger
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D. Pospiech
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F. B�hme
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K. J. Eichhorn
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H. W. Siesler
1991 ◽
Vol 19
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pp. 267-270
David Casasent
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Demetri Psaltis