The Determination of HF, HCl, SiF4, and HCF3 in WF6 Gas

1974 ◽  
Vol 28 (2) ◽  
pp. 139-142 ◽  
Author(s):  
C. L. Chaney ◽  
J. Chin
Keyword(s):  
Infrared Absorption ◽  
Gas Absorption ◽  
Absorption Method ◽  
Absorption Cell ◽  
Cell Sensitivity ◽  
Gas Sampling ◽  
Calibration Curves

An infrared absorption method in the 1- to 15-µ range has been developed for determining HF, HCl, HCF3, and SiF4 in WF6, gas. Because of the reactivity and corrosiveness of WF6, a special gas absorption cell and gas-sampling apparatus were designed and built. Calibration curves were generated for a 10-cm cell. Sensitivity values were 100 wppm for HF and HCl, and 10 wppm for HCF3 and SiF4.

Discussion of Problems of Measurement Carbon on the Inner Surface of Inner Grooved Copper Tube by Infrared Absorption Method

2012 ◽  
Vol 503-504 ◽  
pp. 1347-1350
Author(s):  
Huai Bao Yuan ◽  
Yue Hong Li
Keyword(s):  
Flow Rate ◽  
Infrared Absorption ◽  
Copper Tube ◽  
Absorption Method ◽  
Calibration Constant ◽  
Integral Calculus ◽  
Surface Carbon ◽  
Inner Surface ◽  
Recovery Experiment

The inner surface carbon in the inner grooved copper tube was determined by tube furnace heating-infrared absorption method. Some factors which influenced the determination such as sample preparation and cleaning, flow rate, furnace constants, blank value, calibration constant were tested and optimized. The inner surface carbon of copper tube was released completely while the experiment temperature was chosen as 400~600°C and the flow rate of oxygen was 750 mL/min. And the obtained integral calculus curve was ideal. The method has been applied to the determination of inner surface carbon in the inner grooved copper tube with carbon content of 0.24 mg/dm2. The result of the RSD was 3.7％. And the recovery experiment through joining in synthesize carbon sample was carried on, the recovery was 98～103%.

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