Application of a Gas Sampling Introduction System for Inductively Coupled Plasma Spectroscopy and Analyses of Various Plasma Gases

1987 ◽  
Vol 41 (2) ◽  
pp. 219-226 ◽  
Author(s):  
Karl E. Mautz ◽  
Michael L. Parsons ◽  
Carleton B. Moore
Keyword(s):  
Inductively Coupled Plasma ◽  
Sample Introduction ◽  
Plasma Spectroscopy ◽  
Spectral Analyses ◽  
Argon Gas ◽  
Gas Sampling ◽  
Inductively Coupled ◽  
Instrument Performance ◽  
Gaseous Sample ◽  
Plasma Spectrometer

An inductively coupled plasma spectrometer was modified for gaseous sample introduction. The system uses a gas proportioner utilizing rotameters to achieve sample gas concentrations and mixing with the sample argon gas. Modifications of instruments were performed to enhance stability and compatability of gaseous sample introduction. Instrument performance was characterized for optimization of spectral signals produced from plasma gases. Spectral analyses of gaseous samples including CF4, SF6, O2, N2, air, and mixtures of CF4-O2 and CF4-O2/N2 were performed. Identification of plasma gas and plasma-induced byproducts, both atomic and molecular, were determined.

Volatile species of arsenic(iii) with fluoride for gaseous sample introduction into the inductively coupled plasma

1998 ◽  
Vol 13 (3) ◽  
pp. 215-220 ◽  
Author(s):  
A. Lopez-molinero ◽  
M. Benito ◽  
Y. Aznar ◽  
A. Villareal ◽  
J. R. Castillo
Keyword(s):  
Inductively Coupled Plasma ◽  
Sample Introduction ◽  
Volatile Species ◽  
Inductively Coupled ◽  
Gaseous Sample

Atomic Nitrogen Spectra in the Argon Inductively Coupled Plasma (ICP)

1980 ◽  
Vol 34 (3) ◽  
pp. 338-348 ◽  
Author(s):  
S. J. Northway ◽  
R. M. Brown ◽  
R. C. Fry
Keyword(s):  
Inductively Coupled Plasma ◽  
Near Infrared ◽  
Argon Plasma ◽  
Infrared Region ◽  
High Energy ◽  
Loop System ◽  
Sample Introduction ◽  
Atomic Nitrogen ◽  
Gas Sampling ◽  
Inductively Coupled

Nonresonant, low-energy (visible-near infrared) atomic nitrogen transitions from high-energy (11 to 14.4 eV) doublet and quartet excited N(I) states are observed in the 1.5 to 2.2 kW argon inductively coupled plasma (ICP) when gaseous compounds containing this element (N) are introduced as samples. A Table of ICP excited nitrogen (I) lines and relative emission intensities from 2225 to 10 950 Å is presented. A number of new nitrogen lines are observed for which transitions have not been assigned. The ICP nonresonance emission spectrum of atomic nitrogen [N(I)] is found to be especially good in the near infrared region. The use of near infrared nonresonant N(I) lines for the analytical detection of nitrogen is reported. The relative intensity of N(I) emission (derived from N2 samples) is at a maximum between the turns of the rf load coil. An “equal intensity” contour “map” of N(I) emission in the ICP is presented using N2 as the sample. The present limit of nitrogen detection in argon for nonoptimized conditions is 1.0 ppm (v/v) using continuous sample introduction (limited by photomultiplier noise). For gas sampling loop injections, the present detection limit is 0.3 μg (limited by atmospheric leakage or permeation contamination into the sampling loop system). Considerable improvement is expected in the future. The relative contributions to the baseline signal of: (1) atmospheric nitrogen entrainment in the argon plasma, (2) atmospheric permeation into the present Teflon gas sampling loop system, and (3) argon tank contaminants are evaluated. Suggestions for further improvement are given. The response is linear, and the short-term precision for repetitive introduction of samples containing 20 μg of N2 is 0.4% RSD using a 157 μl Teflon gas sampling loop.

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