Parametric Study of a Low-Pressure Theta-Pinch Discharge in Argon for Preliminary Analytical Optimization

1989 ◽  
Vol 43 (6) ◽  
pp. 991-997 ◽  
Author(s):  
Jeffrey S. White ◽  
Gae Ho Lee ◽  
Alexander Scheeline
Keyword(s):  
Discharge Current ◽  
Parametric Study ◽  
Low Pressure ◽  
Gas Pressure ◽  
Discharge Energy ◽  
Current Waveform ◽  
Theta Pinch ◽  
Discharge Gas

The qualitative dependence of spectrochemical performance of a thetapinch discharge on a variety of experimental variables including discharge gas pressure, sample positioning, discharge energy, and discharge current waveform is reported.

Observation of Partial Discharge Current Waveform under Inverter Surge Application

2012 ◽  
Vol 132 (2) ◽  
pp. 187-191 ◽  
Author(s):  
Yoshinobu Murakami ◽  
Takahiro Takino ◽  
Naohiro Hozumi ◽  
Masayuki Nagao
Keyword(s):  
Discharge Current ◽  
Partial Discharge ◽  
Current Waveform

scholarly journals Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)

Plasma ◽  
2021 ◽  
Vol 4 (2) ◽  
pp. 239-251
Author(s):  
Masaomi Sanekata ◽  
Hiroshi Nishida ◽  
Tatsuya Watabe ◽  
Yuki Nakagomi ◽  
Yoshihiro Hirai ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Discharge Current ◽  
Electrical Breakdown ◽  
Pulsed Power ◽  
Current Waveform ◽  
Delayed Discharge ◽  
Plot Analysis ◽  
Delay Times ◽  
Discharge Behavior ◽  
Delayed Discharges

Delayed discharges due to electrical breakdown are observed in modulated pulsed pow er magnetron sputtering (MPPMS) plasma of titanium. The delayed discharge, which is remarkable with decreasing argon gas pressure, transforms the discharge current waveform from a standard modulated pulsed discharge current waveform to a comb-like discharge current waveform consisting of several pulses with high power. In addition, the delay times, consisting of statistical times and formative times in the delayed MPPMS discharges, are experimentally measured with the help of Laue plot analysis. The pressure dependence of delay times observed indicates that the delayed discharge behavior matches the breakdown characteristics well. In the present study, the delayed discharge dynamics of the comb-like discharge current waveform, which can be the origin of deep oscillation magnetron sputtering, are investigated based on measurement of the delay times and the characteristics of discharge current waveforms.

Parametric study of zirconia nanoparticle synthesis in low pressure flames

2001 ◽  
Vol 44 (8-9) ◽  
pp. 2259-2262 ◽  
Author(s):  
A Colibaba-Evulet ◽  
V Shukla ◽  
N.G Glumac ◽  
B Kear ◽  
F Cosandey
Keyword(s):  
Parametric Study ◽  
Nanoparticle Synthesis ◽  
Low Pressure ◽  
Zirconia Nanoparticle

scholarly journals Diagnostics of low-pressure capacitively coupled RF discharge argon plasma

2019 ◽  
Vol 13 (27) ◽  
pp. 76-82
Author(s):  
Kadhim A. Aadim
Keyword(s):  
Electron Temperature ◽  
Electron Density ◽  
Langmuir Probe ◽  
Gas Flow ◽  
Low Pressure ◽  
Gas Pressure ◽  
Rf Discharge ◽  
Electrode Gap ◽  
Probe Characteristic ◽  
Capacitively Coupled

Low-pressure capacitively coupled RF discharge Ar plasma has been studied using Langmuir probe. The electron temperature, electron density and Debay length were calculated under different pressures and electrode gap. In this work the RF Langmuir probe is designed using 4MHz filter as compensation circuit and I-V probe characteristic have been investigated. The pressure varied from 0.07 mbar to 0.1 mbar while electrode gap varied from 2-5 cm. The plasma was generated using power supply at 4MHz frequency with power 300 W. The flowmeter is used to control Argon gas flow in the range of 600 standard cubic centimeters per minute (sccm). The electron temperature drops slowly with pressure and it's gradually decreased when expanding the electrode gap. As the gas pressure increases, the plasma density rises slightly at low gas pressure while it drops little at higher gas pressure. The electron density decreases rapidly with expand distances between electrodes.

An Electronic, Adjustable-Waveform Current Generator for Use with a Quarter-Wave Resonant Spark Source

1979 ◽  
Vol 33 (5) ◽  
pp. 463-467 ◽  
Author(s):  
Tsutomu Araki ◽  
John P. Walters
Keyword(s):  
Discharge Current ◽  
Repetition Rate ◽  
Current Waveform ◽  
Current Generator ◽  
Fast Scr ◽  
Quarter Wave ◽  
Ladder Network ◽  
Discharge Chemistry ◽  
Network Functions ◽  
A Current

A newly designed current generator for use with a quarter-wave spark source for a fundamental spectroscopic study of spark discharge chemistry is described. The generator outputs a trapezoidal discharge current waveform whose duration and amplitude are adjustable independently of the source repetition rate up to 5 μsec and 30 A, respectively. A multi-π section LC ladder network and a fast SCR are combined for the new generator to produce the adjustable discharge current waveform, in place of a single RC filter for a conventional current generator. The LC network functions as a current width stretcher and the SCR shapes the pulse into the desired duration by shunt clipping the tail. To evaluate the performance of the new current generator, transient emission waveforms of Cu lines are compared for a trapezoidal current waveform and a simple relaxation discharge waveform with that generated from the conventional generator.

Effects of gas pressure and discharge current on beam composition in a magnetron discharge ion source

2019 ◽  
Vol 90 (11) ◽  
pp. 113312
Author(s):  
Alexey Vizir ◽  
Efim Oks ◽  
Maxim Shandrikov ◽  
Bin Zhang ◽  
Georgy Yushkov
Keyword(s):  
Discharge Current ◽  
Ion Source ◽  
Gas Pressure ◽  
Magnetron Discharge
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