Study on Effect of Neutral Gas Pressure on Plasma Characteristics in Capacitive RF Argon Glow Discharges at Low Pressure by Fluid Modeling

2018 ◽  
Vol 46 (5) ◽  
pp. 1738-1746 ◽  
Author(s):  
Tagra Samir ◽  
Yue Liu ◽  
Lulu Zhao
Keyword(s):  
Low Pressure ◽  
Gas Pressure ◽  
Fluid Modeling ◽  
Neutral Gas ◽  
Glow Discharges ◽  
Plasma Characteristics

Experimental investigations of glow discharges in hollow cathode geometries at low pressure

2005 ◽  
Vol 33 (2) ◽  
pp. 384-385 ◽  
Author(s):  
T. Callegari ◽  
F. Gegot ◽  
L.C. Pitchford ◽  
J. Galy ◽  
J.P. Boeuf
Keyword(s):  
Hollow Cathode ◽  
Low Pressure ◽  
Experimental Investigations ◽  
Glow Discharges

scholarly journals Diagnostics of low-pressure capacitively coupled RF discharge argon plasma

2019 ◽  
Vol 13 (27) ◽  
pp. 76-82
Author(s):  
Kadhim A. Aadim
Keyword(s):  
Electron Temperature ◽  
Electron Density ◽  
Langmuir Probe ◽  
Gas Flow ◽  
Low Pressure ◽  
Gas Pressure ◽  
Rf Discharge ◽  
Electrode Gap ◽  
Probe Characteristic ◽  
Capacitively Coupled

Low-pressure capacitively coupled RF discharge Ar plasma has been studied using Langmuir probe. The electron temperature, electron density and Debay length were calculated under different pressures and electrode gap. In this work the RF Langmuir probe is designed using 4MHz filter as compensation circuit and I-V probe characteristic have been investigated. The pressure varied from 0.07 mbar to 0.1 mbar while electrode gap varied from 2-5 cm. The plasma was generated using power supply at 4MHz frequency with power 300 W. The flowmeter is used to control Argon gas flow in the range of 600 standard cubic centimeters per minute (sccm). The electron temperature drops slowly with pressure and it's gradually decreased when expanding the electrode gap. As the gas pressure increases, the plasma density rises slightly at low gas pressure while it drops little at higher gas pressure. The electron density decreases rapidly with expand distances between electrodes.

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