scholarly journals Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)

Plasma ◽  
2021 ◽  
Vol 4 (2) ◽  
pp. 239-251
Author(s):  
Masaomi Sanekata ◽  
Hiroshi Nishida ◽  
Tatsuya Watabe ◽  
Yuki Nakagomi ◽  
Yoshihiro Hirai ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Discharge Current ◽  
Electrical Breakdown ◽  
Pulsed Power ◽  
Current Waveform ◽  
Delayed Discharge ◽  
Plot Analysis ◽  
Delay Times ◽  
Discharge Behavior ◽  
Delayed Discharges

Delayed discharges due to electrical breakdown are observed in modulated pulsed pow er magnetron sputtering (MPPMS) plasma of titanium. The delayed discharge, which is remarkable with decreasing argon gas pressure, transforms the discharge current waveform from a standard modulated pulsed discharge current waveform to a comb-like discharge current waveform consisting of several pulses with high power. In addition, the delay times, consisting of statistical times and formative times in the delayed MPPMS discharges, are experimentally measured with the help of Laue plot analysis. The pressure dependence of delay times observed indicates that the delayed discharge behavior matches the breakdown characteristics well. In the present study, the delayed discharge dynamics of the comb-like discharge current waveform, which can be the origin of deep oscillation magnetron sputtering, are investigated based on measurement of the delay times and the characteristics of discharge current waveforms.

Calculation of Discharge Current Waveforms in High Voltage Spark Sources. I. Solution of Constant Parameter Model

1981 ◽  
Vol 35 (1) ◽  
pp. 70-77 ◽  
Author(s):  
Alexander Scheeline
Keyword(s):  
High Voltage ◽  
Discharge Current ◽  
Power Dissipation ◽  
Constant Parameter ◽  
Current Waveform ◽  
Nonlinear Source ◽  
Instantaneous Power ◽  
Discharge Behavior ◽  
Parameter Approach

Equations are derived for computing the current waveform and instantaneous power dissipation in high voltage spark sources containing a branched waveshaping network. For constant or dual valued circuit parameters, examples of waveform characteristics are presented. Limitations of this constant parameter approach are discussed, and suggestions made for application of the equations for simulating nonlinear source and discharge behavior.

Observation of Partial Discharge Current Waveform under Inverter Surge Application

2012 ◽  
Vol 132 (2) ◽  
pp. 187-191 ◽  
Author(s):  
Yoshinobu Murakami ◽  
Takahiro Takino ◽  
Naohiro Hozumi ◽  
Masayuki Nagao
Keyword(s):  
Discharge Current ◽  
Partial Discharge ◽  
Current Waveform

scholarly journals Influence of modulation frequency on the synthesis of thin films in pulsed magnetron sputtering processes

2018 ◽  
Vol 36 (4) ◽  
pp. 697-703 ◽  
Author(s):  
G.W. Strzelecki ◽  
K. Nowakowska-Langier ◽  
R. Chodun ◽  
S. Okrasa ◽  
B. Wicher ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Optical Emission Spectroscopy ◽  
Film Growth ◽  
Modulation Frequency ◽  
Optical Emission ◽  
Pulsed Power ◽  
Additional Parameter ◽  
The Impact ◽  
Different Levels ◽  
Pulsed Magnetron

AbstractThe research on the influence of modulation frequency on the properties of films synthesized using a unique pulsed power supply combined with a standard unbalanced circular magnetron was conducted in the process of pulsed magnetron sputtering (PMS). It was shown that by using different levels of modulation, the composition of plasma (measured by optical emission spectroscopy, OES) as well as film growth rate and morphology (observed with scanning electron microscope, SEM), can be changed. The impact of modulation is related to the used materials and gases and can vary significantly. It was concluded that modulation frequency can greatly influence the synthesis of materials and can be used as an additional parameter in PMS. Specific relations between modulation frequency and synthesized material require further investigation.

An Electronic, Adjustable-Waveform Current Generator for Use with a Quarter-Wave Resonant Spark Source

1979 ◽  
Vol 33 (5) ◽  
pp. 463-467 ◽  
Author(s):  
Tsutomu Araki ◽  
John P. Walters
Keyword(s):  
Discharge Current ◽  
Repetition Rate ◽  
Current Waveform ◽  
Current Generator ◽  
Fast Scr ◽  
Quarter Wave ◽  
Ladder Network ◽  
Discharge Chemistry ◽  
Network Functions ◽  
A Current

A newly designed current generator for use with a quarter-wave spark source for a fundamental spectroscopic study of spark discharge chemistry is described. The generator outputs a trapezoidal discharge current waveform whose duration and amplitude are adjustable independently of the source repetition rate up to 5 μsec and 30 A, respectively. A multi-π section LC ladder network and a fast SCR are combined for the new generator to produce the adjustable discharge current waveform, in place of a single RC filter for a conventional current generator. The LC network functions as a current width stretcher and the SCR shapes the pulse into the desired duration by shunt clipping the tail. To evaluate the performance of the new current generator, transient emission waveforms of Cu lines are compared for a trapezoidal current waveform and a simple relaxation discharge waveform with that generated from the conventional generator.

Hospitalized After Medical Readiness for Discharge: A Multidisciplinary Quality Improvement Initiative to Identify Discharge Barriers in General Medicine Patients

2019 ◽  
Vol 35 (1) ◽  
pp. 23-28 ◽  
Author(s):  
Nicholas Meo ◽  
Joshua M. Liao ◽  
Ashok Reddy
Keyword(s):  
Quality Improvement ◽  
General Medicine ◽  
Quality Improvement Initiative ◽  
Prolonged Hospitalization ◽  
Delayed Discharge ◽  
Decision Making Capacity ◽  
Bed Days ◽  
Delayed Discharges ◽  
Patient Subgroups ◽  
Length Of Hospitalization

Reducing the length of hospitalization is a shared priority for patients, clinicians, and other health care stakeholders. However, patients can remain hospitalized after being “medically ready” for discharge, accumulating delayed discharge bed days (DDBDs). As part of a quality improvement initiative, the authors developed a method to measure DDBD and define discrete barriers to discharge identified by inpatient clinicians. Patients with delayed discharge had a higher rate of in-hospital complications compared to those who were discharged routinely. To identify modifiable barriers among patients with delayed discharges, 2 patient subgroups were defined: prolonged hospitalization (>19 DDBDs, top quintile accumulated) and extended hospitalization (≤19 DDBDs). Patients with prolonged hospitalization were more likely than those with extended hospitalization to have financial ( P < .001) or behavioral ( P < .001) barriers, homelessness ( P < .05), and impairment of decision-making capacity ( P < .01). Understanding the characteristics and discharge barriers of patients who are hospitalized despite medical readiness may increase appropriateness of inpatient resources.

scholarly journals Computer simulation of sputtering of graphite target in magnetron sputtering device with two zones of erosion

2015 ◽  
Vol 33 (1) ◽  
pp. 82-94
Author(s):  
R.V. Bogdanov ◽  
O.M. Kostiukevych
Keyword(s):  
Carbon Nanotubes ◽  
Computer Simulation ◽  
Monte Carlo ◽  
Magnetron Sputtering ◽  
Energy Flux ◽  
Discharge Current ◽  
Carbon Films ◽  
Monte Carlo Code ◽  
Graphite Target ◽  
Computer Simulation Program

AbstractA computer simulation program for discharge in a magnetron sputtering device with two erosion zones was developed. Basic laws of the graphite target sputtering process and transport of sputtered material to the substrate were taken into account in the Monte Carlo code. The results of computer simulation for radial distributions of density and energy flux of carbon atoms on the substrate (at different values of discharge current and pressure of the working gas) confirmed the possibility of obtaining qualitative homogeneous films using this magnetron sputtering device. Also the discharge modes were determined for this magnetron sputtering device, in which it was possible to obtain such energy and density of carbon atoms fluxes, which were suitable for deposition of carbon films containing carbon nanotubes and other nanoparticles.

scholarly journals A Waiting List to Go Home: An Analysis of Delayed Discharges From Surgical Beds

2006 ◽  
Vol 88 (7) ◽  
pp. 650-652 ◽  
Author(s):  
RT Benson ◽  
JC Drew ◽  
RB Galland
Keyword(s):  
Social Service ◽  
Service Provision ◽  
Demographic Data ◽  
The Other ◽  
Intermediate Care ◽  
Delayed Discharge ◽  
Surgical Ward ◽  
Patient Stay ◽  
Bed Days ◽  
Delayed Discharges

INTRODUCTION The aim of this paper was to analyse patients who were unable to be discharged from a surgical ward despite being surgically fit to leave. PATIENTS AND METHODS Data were collected on all surgical in-patients on a single day. Patients who were surgically fit for discharge but whose discharge was delayed were identified. Demographic data and reasons for delay were noted. RESULTS Nine of 75 patients (12%) were surgical bed blockers. These patients were more likely to have been admitted as emergencies (P = 0.035) and were older (P < 0.01) than the remaining patients. They occupied 35% of the total ‘bed-days’ of the group as a whole with a median in-patient stay of 41 days compared with 2 days for the other patients. Trust-collected data, based on UK Government guidelines, showed only one surgical delayed discharge patient on the day studied. CONCLUSIONS Due to problems in defining delayed discharge Government figures probably underestimate the true numbers. Lack of intermediate care and social service provision are a major cause of bed blocking.

Parametric Study of a Low-Pressure Theta-Pinch Discharge in Argon for Preliminary Analytical Optimization

1989 ◽  
Vol 43 (6) ◽  
pp. 991-997 ◽  
Author(s):  
Jeffrey S. White ◽  
Gae Ho Lee ◽  
Alexander Scheeline
Keyword(s):  
Discharge Current ◽  
Parametric Study ◽  
Low Pressure ◽  
Gas Pressure ◽  
Discharge Energy ◽  
Current Waveform ◽  
Theta Pinch ◽  
Discharge Gas

The qualitative dependence of spectrochemical performance of a thetapinch discharge on a variety of experimental variables including discharge gas pressure, sample positioning, discharge energy, and discharge current waveform is reported.

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