AbstractMost deposition chambers sold into the optical coating market today are outfitted with an automated control system. We surveyed several of the larger equipment providers, and nine of them responded with information about their hardware architecture, data logging, level of automation, error handling, user interface, and interfacing options. In this paper, we present a summary of the results of the survey and describe commonalities and differences together with some considerations of tradeoffs, such as between capability for high customization and simplicity of operation.
Oleophobic optical coating deposited by magnetron PVD
