Considerations on automation of coating machines
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AbstractMost deposition chambers sold into the optical coating market today are outfitted with an automated control system. We surveyed several of the larger equipment providers, and nine of them responded with information about their hardware architecture, data logging, level of automation, error handling, user interface, and interfacing options. In this paper, we present a summary of the results of the survey and describe commonalities and differences together with some considerations of tradeoffs, such as between capability for high customization and simplicity of operation.
2002 ◽
Vol 34
(10)
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pp. 12
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AUTOMATIC CHECK OF AUTOMATED CONTROL SYSTEM FUNCTIONAL BLOCKS STATUS AND COMPLEX DEVICES DIAGNOSTICS
2017 ◽
Vol 59
(1)
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pp. 75-80
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2020 ◽
Vol 1661
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pp. 012101
2010 ◽
Vol 37
(5)
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pp. 131-135
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2016 ◽
Vol 58
(11)
◽
pp. 810-814
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