Laser interference ablation by ultrashort UV laser pulses via diffractive beam management

2020 ◽  
Vol 9 (1-2) ◽  
pp. 41-52 ◽  
Author(s):  
Jan-Hendrik Klein-Wiele ◽  
Andreas Blumenstein ◽  
Peter Simon ◽  
Jürgen Ihlemann
Keyword(s):  
Laser Pulses ◽  
Diffractive Optical Elements ◽  
Uv Laser ◽  
Laser Interference ◽  
Periodic Patterns ◽  
Optical Elements ◽  
Periodic Surface ◽  
Coherent Beams ◽  
Surface Patterns ◽  
Computer Generated Holograms

AbstractThe fabrication of periodic surface patterns on various materials by ultrashort ultraviolet (UV) laser pulses is reviewed. Laser interference ablation using two or more coherent beams leads to deterministic, strictly periodic patterns. The generation of the interfering beams is accomplished by diffractive optical elements like gratings, grating systems or computer-generated holograms. The recombination of the diffracted beams is performed by optical imaging or diffractive beam management. Ultrashort UV pulses are especially suited for generating micron- to submicron-sized deterministic periodic patterns on metals and semiconductors.

Laser interference patterning methods: Possibilities for high-throughput fabrication of periodic surface patterns

2017 ◽  
Vol 6 (3-4) ◽  
Author(s):  
Andrés Fabián Lasagni
Keyword(s):  
Theoretical Calculations ◽  
Three Dimensional ◽  
Sample Surface ◽  
Material Surface ◽  
Laser Interference ◽  
Periodic Arrays ◽  
Coherent Beams ◽  
Surface Patterns ◽  
Surface Microstructures ◽  
2D And 3D

AbstractFabrication of two- and three-dimensional (2D and 3D) structures in the micro- and nano-range allows a new degree of freedom to the design of materials by tailoring desired material properties and, thus, obtaining a superior functionality. Such complex designs are only possible using novel fabrication techniques with high resolution, even in the nanoscale range. Starting from a simple concept, transferring the shape of an interference pattern directly to the surface of a material, laser interferometric processing methods have been continuously developed. These methods enable the fabrication of repetitive periodic arrays and microstructures by irradiation of the sample surface with coherent beams of light. This article describes the capabilities of laser interference lithographic methods for the treatment of both photoresists and solid materials. Theoretical calculations are used to calculate the intensity distributions of patterns that can be realized by changing the number of interfering laser beams, their polarization, intensity and phase. Finally, different processing systems and configurations are described and, thus, demonstrating the possibility for the fast and precise tailoring of material surface microstructures and topographies on industrial relevant scales as well as several application cases for both methods.

Control of transverse mode content and polarization structure of terahertz coherent beams

2019 ◽  
Vol 43 (6) ◽  
pp. 1103-1108
Author(s):  
V.S. Pavelyev ◽  
Yu.Yu. Choporova ◽  
N.D. Osintseva ◽  
K.N. Tukmakov ◽  
B.A. Knyazev
Keyword(s):  
Terahertz Radiation ◽  
Free Electron ◽  
Free Electron Laser ◽  
Transverse Mode ◽  
Diffractive Optical Elements ◽  
Optical Elements ◽  
Polarization Structure ◽  
Mode Content ◽  
Coherent Beams ◽  
Illuminating Beam

The paper is devoted to investigation of forming multimode coherent beams of terahertz radiation with pre-given transverse mode content and terahertz vector beams by use of silicon diffractive optical elements forming single modes from terahertz free-electron laser illuminating beam.

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