Study of the Vaporization of Ca-Amalgams with a New Knudsen Cell - Mass Spectrometer System

1984 ◽  
Vol 75 (1) ◽  
pp. 70-75
Author(s):  
Klaus Hilpert
Keyword(s):  
Mass Spectrometer ◽  
Cell Mass ◽  
Knudsen Cell ◽  
Mass Spectrometer System ◽  
Spectrometer System

The Influence of Doping on the Etching of Si(111)

1986 ◽  
Vol 75 ◽  
Author(s):  
Harold F. Winters ◽  
D. Haarer
Keyword(s):  
Mass Spectrometer ◽  
Doping Level ◽  
Etch Rate ◽  
Plasma Reactors ◽  
Doping Effects ◽  
Mass Spectrometer System ◽  
Spectrometer System

AbstractIt has been recognized for some time that the doping level in silicon influences etch rate in plasma environments[1–8]. We have now been able to reproduce and investigate these doping effects in a modulated-beam, mass spectrometer system described previously [9] using XeF2 as the etchant gas. The phenomena which have been observed in plasma reactors containing fluorine atoms are also observed in our experiments. The data has led to a model which explains the major trends.

Measurement of changes in atmospheric Ar/N2 ratio using a rapid-switching, single-capillary mass spectrometer system

Tellus B ◽  
2004 ◽  
Vol 56 (4) ◽  
pp. 322-338 ◽  
Author(s):  
RALPH F. KEELING ◽  
TEGAN BLAINE ◽  
BILL PAPLAWSKY ◽  
LAURA KATZ ◽  
CHRIS ATWOOD ◽  
...  
Keyword(s):  
Mass Spectrometer ◽  
Mass Spectrometer System ◽  
Spectrometer System ◽  
Rapid Switching
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