scholarly journals Inductively Coupled Plasma Reactive Ion Etching of Lead Zirconate Titanate Thin Films for MEMS Application

2009 ◽  
Vol 129 (4) ◽  
pp. 105-109 ◽  
Author(s):  
Jian Lu ◽  
Yi Zhang ◽  
Tsuyoshi Ikehara ◽  
Toshihiro Itoh ◽  
Ryutaro Maeda ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Lead Zirconate ◽  
Ion Etching ◽  
Inductively Coupled ◽  
Zirconate Titanate

Reactive ion etching of sol-gel deposited lead zirconate titanate (pzt) thin films in sf6 plasmas

2001 ◽  
Vol 37 (1-4) ◽  
pp. 67-74 ◽  
Author(s):  
George McLane ◽  
Ronald Polcawich ◽  
Jeffrey Pulskamp ◽  
Brett Piekarski ◽  
Madan Dubey ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Reactive Ion Etching ◽  
Lead Zirconate ◽  
Ion Etching ◽  
Pzt Thin Films ◽  
Zirconate Titanate

Inductively Coupled Plasma Reactive Ion Etching of GeSbTe Thin Films in a HBr/Ar Gas

2007 ◽  
Vol 90 (1) ◽  
pp. 95-106 ◽  
Author(s):  
JANG WOO LEE ◽  
HAN NA CHO ◽  
SU RYUN MIN ◽  
CHEE WON CHUNG
Keyword(s):  
Thin Films ◽  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled ◽  
Ar Gas

Inductively coupled plasma reactive ion etching of copper thin films using ethylenediamine/butanol/Ar plasma

Vacuum ◽  
2020 ◽  
Vol 181 ◽  
pp. 109421
Author(s):  
Moon Hwan Cha ◽  
Eun Taek Lim ◽  
Sung Yong Park ◽  
Ji Su Lee ◽  
Chee Won Chung
Keyword(s):  
Thin Films ◽  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled ◽  
Ar Plasma

Inductively coupled plasma reactive ion etching of titanium nitride thin films in a Cl2/Ar plasma

2008 ◽  
Vol 14 (3) ◽  
pp. 297-302 ◽  
Author(s):  
Su Ryun Min ◽  
Han Na Cho ◽  
Yue Long Li ◽  
Sung Keun Lim ◽  
Seung Pil Choi ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled ◽  
Ar Plasma

Magnetically Enhanced Reactive Ion Etching of Lead Zirconate Titanate Thin Film by CHF3Plasma

2000 ◽  
Vol 39 (Part 1, No. 1) ◽  
pp. 320-323 ◽  
Author(s):  
Yin-yin Lin ◽  
Qin Liu ◽  
Ting-ao Tang ◽  
Xi Yao ◽  
Wei-ning Huang
Keyword(s):  
Thin Film ◽  
Lead Zirconate Titanate ◽  
Reactive Ion Etching ◽  
Lead Zirconate ◽  
Ion Etching ◽  
Zirconate Titanate ◽  
Titanate Thin Film
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