Growth and Characteristics of ZnO Nanotube Arrays on Si Substrate by Atomic Layer Deposition in Anodic Aluminum Oxide

2008 ◽  
Author(s):  
Soo Jin Chua ◽  
Miao Wang ◽  
Han Gao ◽  
Carl V. Thompson ◽  
Lee Kheng Tan
Keyword(s):  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Atomic Layer ◽  
Nanotube Arrays ◽  
Si Substrate ◽  
Anodic Aluminum ◽  
Zno Nanotube ◽  
Layer Deposition

Low-temperature growth of ZnO nanorods in anodic aluminum oxide on Si substrate by atomic layer deposition

2007 ◽  
Vol 90 (3) ◽  
pp. 033104 ◽  
Author(s):  
Ching-Jung Yang ◽  
Shun-Min Wang ◽  
Shih-Wei Liang ◽  
Yung-Huang Chang ◽  
Chih Chen ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Zno Nanorods ◽  
Atomic Layer ◽  
Si Substrate ◽  
Temperature Growth ◽  
Anodic Aluminum ◽  
Layer Deposition

scholarly journals Anodic Aluminum Oxide Templated Channel Electrodes via Atomic Layer Deposition

2019 ◽  
Vol 6 (25) ◽  
pp. 389-394
Author(s):  
Alex B. Martinson ◽  
Jeff Elam ◽  
Joseph T. T. Hupp ◽  
Michael Pellin
Keyword(s):  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Atomic Layer ◽  
Anodic Aluminum ◽  
Layer Deposition

scholarly journals Effects of Anodic Aluminum Oxide Substrate Pore Geometry on the Gas-Phase Photocatalytic Activity of ZnO/Al2O3 Composites Prepared by Atomic Layer Deposition

Symmetry ◽  
2021 ◽  
Vol 13 (8) ◽  
pp. 1456
Author(s):  
Bozhidar I. Stefanov ◽  
Blagoy S. Blagoev ◽  
Lars Österlund ◽  
Boriana R. Tzaneva ◽  
George V. Angelov
Keyword(s):  
Photocatalytic Activity ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Gas Phase ◽  
Anodic Aluminum Oxide ◽  
Photocatalytic Oxidation ◽  
Atomic Layer ◽  
Anodic Aluminum ◽  
Layer Deposition ◽  
Oxide Substrate

We report on the photocatalytic activity of ZnO layers deposited by atomic layer deposition on a porous anodic aluminum oxide substrate with hexagonal pore symmetry and varied pore dimensions. ZnO/Al2O3 composites were prepared with pore diameters in the range 93–134 nm and interpore distance in the range 185–286 nm, and their photocatalytic activity was measured for gas-phase photocatalytic oxidation of acetaldehyde at varying UV illumination intensities (0.08–3.94 mW cm−2). The results show that substrates with narrower pore diameters (<115 nm, in the case of this study) have a detrimental effect on the photocatalyst performance, despite their higher effective surface. The results are explained on the basis of limited mass transfer inside the porous structure and can be used as a guideline in the purposeful design of photocatalysts with a nanoporous or nanotubular structure.

Effect of Atomic Layer Deposition Coatings on the Surface Structure of Anodic Aluminum Oxide Membranes

2005 ◽  
Vol 109 (29) ◽  
pp. 14059-14063 ◽  
Author(s):  
Guang Xiong ◽  
Jeffrey W. Elam ◽  
Hao Feng ◽  
Catherine Y. Han ◽  
Hsien-Hau Wang ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Surface Structure ◽  
Anodic Aluminum Oxide ◽  
Atomic Layer ◽  
Anodic Aluminum ◽  
Layer Deposition ◽  
Oxide Membranes
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