Mev Ion Induced Modification of The Native Oxide of Silicon

Ion Channeling ◽

ABSTRACTWe have studied the native oxide of silicon (110) and the changes roduced by MeV ion bombardment using transmission ion channeling of 5.9 MeV 9Be, and Elastic Recoil Detection Analysis (ERDA). Transmission channeling was used to measure interfacial nonregistered Si and adsorbed C and 0. ERDA was used to measure the surface concentration of H. MeV ions were found to cause an increase in the interfacial nonregistered silicon which saturates at approximately one monolayer. Rapid desorption of hydrogen was observed. The effect of 2 keV electrons on the silicon native oxide was also studied by Auger Electron Spectroscopy.

Silicon Crystallization from Annealed Cu/A-Si:H Bilayers: A Multitechnique Study

MRS Proceedings ◽

10.1557/proc-321-585 ◽

1993 ◽

Vol 321 ◽

Author(s):

C. A. Achete ◽

L. Bernardino ◽

F. L. Freire ◽

G. Mariotto ◽

H. Niehus

Keyword(s):

Electron Spectroscopy ◽

Rutherford Backscattering Spectrometry ◽

Analytical Techniques ◽

Silicide Formation ◽

Elastic Recoil ◽

Copper Silicide ◽

ABSTRACTSilicon crystallization has been observed to occur in copper/a-Si:H thin film bilayers annealed at 280 °C. Copper-silicide formation was observed after annealing at 200 °C. Samples characterization was made by a combination of several analytical techniques: scanning electron Microscopy, Raman spectroscopy through a microscope probe, Auger electron spectroscopy, elastic recoil detection analysis and Rutherford backscattering spectrometry. The possible role of hydrogen in this process is discussed.

Yttrium Oxyhydrides for Photochromic Applications: Correlating Composition and Optical Response

10.26434/chemrxiv.7034585 ◽

2018 ◽

Author(s):

Dmitrii Moldarev ◽

Elbruz M. Baba ◽

Marcos V. Moro ◽

Chang C. You ◽

Smagul Zh. Karazhanov ◽

...

Keyword(s):

Medical Devices ◽

Ternary Diagram ◽

Optical And Electrical Properties ◽

Ambient Conditions ◽

Elastic Recoil ◽

Photochromic Properties ◽

Smart Windows ◽

It has been recently demonstrated that yttrium oxyhydride(YHO) films can exhibit reversible photochromic properties when exposed to illumination at ambient conditions. This switchable optical propertyenables their utilization in many technological applications, such as smart windows, sensors, goggles, medical devices, etc. However, how the composition of the films affects their optical properties is not fully clear and therefore demands a straightforward investigation. In this work, the composition of YHO films manufactured by reactive magnetron sputtering under different conditions is deduced in a ternary diagram from Time-of-Flight Elastic Recoil Detection Analysis (ToF-ERDA). The results suggest that stable compounds are formed with a specificchemical formula – YH<sub>2-δ</sub>O<sub>δ</sub>. In addition, optical and electrical properties of the films are investigated, and a correlation with their compositions is established. The corresponding photochromic response is found in a specific oxygen concentration range (0.45 < δ < 1.5) with maximum and minimum of magnitude on the lower and higher border, respectively.

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

Thickness of ion implanted layers as determined by elastic recoil detection analysis and spectroscopic ellipsometry

10.1016/s0168-583x(03)00817-6 ◽

2003 ◽

Vol 206 ◽

pp. 668-672

Author(s):

S. Mändl ◽

J.W. Gerlach ◽

W. Assmann ◽

B. Rauschenbach

Keyword(s):

Spectroscopic Ellipsometry ◽

Elastic Recoil ◽

Detection Analysis ◽

Ion Implanted

The Paths of Plurally Scattered Ions in Heavy Ion Elastic Recoil Detection Analysis

10.1063/1.1619741 ◽

2003 ◽

Cited By ~ 2

Author(s):

R. D. Franich

Keyword(s):

Heavy Ion ◽

Elastic Recoil ◽

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

Elastic recoil detection analysis with heavy ion beams

10.1016/s0168-583x(97)00872-0 ◽

1998 ◽

Vol 136-138 ◽

pp. 594-602 ◽

Cited By ~ 15

Author(s):

J.A. Davies ◽

J.S. Forster ◽

S.R. Walker

Keyword(s):

Heavy Ion ◽

Ion Beams ◽

Elastic Recoil ◽

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

Time detector design for Time-of-Flight Elastic Recoil Detection Analysis (ToF-E ERDA)

10.1016/j.nimb.2018.11.010 ◽

2019 ◽

Vol 450 ◽

pp. 385-389

Author(s):

Harry J. Whitlow ◽

Patrick Jeanneret ◽

Edouard Guibert ◽

Liping Wang ◽

Mathijs Van Der Meer

Keyword(s):

Time Of Flight ◽

Elastic Recoil ◽

Detection Analysis ◽

Detector Design

Search for Ion Induced Mixing in Ceramic-Ceramic Systems

MRS Proceedings ◽

10.1557/proc-396-101 ◽

1995 ◽

Vol 396 ◽

Author(s):

K.R. Padmanabhan

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Ion Beam ◽

Epitaxial Films ◽

Ion Beam Mixing ◽

Ceramic Substrates ◽

Ion Channeling ◽

Ceramic Films ◽

Dose Dependent

AbstractThin sputtered ceramic films deposited on ceramic substrates were subjected to either Kr+ or Xe+ ion bombardment for ion beam mixing studies in ceramic-ceramic systems. The amount of mixing if any was evaluated from Rutherford backscattering and Auger electron spectroscopy. In some instances ceramic films were deposited on epitaxial films or single crystal substrates for ion channeling analysis. No significant mixing was observed in any of the systems with ZrC. However, analysis of the interface in Si3N4/ SiC system indicates appreciable mixing and ion beam induced damage to the substrate. The mixing appears to be dose dependent for heavier ions.