A New X-Ray Scattering Method for Determining Pore-Size Distribution in Low-k Thin Films

2001 ◽  
Vol 714 ◽  
Author(s):  
Kazuhiko Omote ◽  
Shigeru Kawamura
Keyword(s):  
Thin Films ◽  
Pore Size Distribution ◽  
Pore Size ◽  
Gas Adsorption ◽  
Size Distributions ◽  
X Ray ◽  
X Ray Scattering ◽  
Pore Size Distributions ◽  
Scattering Technique ◽  
Ray Scattering

ABSTRACTWe have successively developed a new x-ray scattering technique for a non-destructive determination of pore-size distributions in porous low-κ thin films formed on thick substrates. The pore size distribution in a film is derived from x-ray diffuse scattering data, which are measured using offset θ/2θ scans to avoid strong specular reflections from the film surface and its substrate. Γ-distribution mode for the pores in the film is used in the calculation. The average diameter and the dispersion parameter of the Γ-distribution function are varied and refined by computer so that the calculated scattering pattern best matches to the experimental pattern. The technique has been used to analyze porous methyl silsesquioxane (MSQ) films. The pore size distributions determined by the x-ray scattering technique agree with that of the commonly used gas adsorption technique. The x-ray technique has been also used successfully determine small pores less than one nanometer in diameter, which is well below the lowest limit of the gas adsorption technique.

Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering

2002 ◽  
Vol 81 (12) ◽  
pp. 2232-2234 ◽  
Author(s):  
E. Huang ◽  
M. F. Toney ◽  
W. Volksen ◽  
D. Mecerreyes ◽  
P. Brock ◽  
...  
Keyword(s):  
Pore Size ◽  
Small Angle ◽  
Size Distributions ◽  
X Ray ◽  
X Ray Scattering ◽  
Pore Size Distributions ◽  
Methyl Silsesquioxane ◽  
Ray Scattering

Evolution of the Pore Size Distribution in Final-Stage Sintering of Alumina Measured by Small-Angle X-ray Scattering

1991 ◽  
Vol 74 (10) ◽  
pp. 2538-2546 ◽  
Author(s):  
Susan Krueger ◽  
Gabrielle G. Long ◽  
David R. Black ◽  
Dennis Minor ◽  
Pete R. Jemian ◽  
...  
Keyword(s):  
Pore Size Distribution ◽  
Pore Size ◽  
Size Distribution ◽  
Small Angle ◽  
Final Stage ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

scholarly journals Porogen Effect of Solvents on Pore Size Distribution of Solvent-Casted Polycaprolactone Thin Films

2018 ◽  
Vol 1 (4) ◽  
Author(s):  
Fariba Safaei ◽  
Shahla Khalili ◽  
Saied Nouri Khorasani ◽  
Laleh Ghasemi-Mobarakeh ◽  
Rasoul Esmaeely Neisiany
Keyword(s):  
Thin Films ◽  
Pore Size Distribution ◽  
Pore Size ◽  
Size Distribution ◽  
Methylene Chloride ◽  
Size Distributions ◽  
Solvent Casting ◽  
Casting Method ◽  
Effect Of Solvents ◽  
Pore Size Distributions

In this study, the effect of porogenic solvents on pore size distribution of the polycaprolactone (PCL) thin films was investigated. Five thin PCL films were prepared using the solvent-casting method. Chloroform, Methylene Chloride (MC) and three different compositions of MC/ Dimethylformamide (DMF) (80/20, 50/50 and 20/80) were used as solvents. Scanning Electron Microscopy (SEM) investigations were employed to study morphology and consequently the pore size distribution of the prepared films. The PCL films made by chloroform and MC as a solvent were completely non-porous. Whereas the other films (made by a combination of MC and DMF) showed both uni-modal and bi-modal pore size distributions.

scholarly journals Modelling of shale rock pore structure based on gas adsorption

2019 ◽  
Vol 92 ◽  
pp. 15006
Author(s):  
Arghya Das ◽  
Sumit Basu ◽  
Ankit Kumar
Keyword(s):  
Pore Size Distribution ◽  
Pore Size ◽  
Size Distribution ◽  
Gas Flow ◽  
Gas Adsorption ◽  
Knudsen Diffusion ◽  
Pore Network Model ◽  
Size Distributions ◽  
Shale Rock ◽  
Pore Size Distributions

Shale rock consists of a complex matrix structure due to presence of nano-scale pores. Owing to such complexity determination and/or prediction of the mineralogical, mechanical, and petrophysical properties (e.g., permeability, porosity, pore size distribution, etc.) of shale is a challenging task. A preliminary estimation of these properties is essential before shale gas exploration. In this study, experimental and numerical analyses are conducted to estimate the permeability, porosity, and pore size distribution of a typical shale sample. Gas adsorption experiments were conducted to characterize the pore spaces of the shale via analysing the isotherms. Using conventional theories, such as BET and BJH methods, surface area, pore volume, and pore size distributions were estimated. On the other hand, gross porosity of the shale samples was measured by conducting gas pycnometry experiment. Finally based on the obtained results an equivalent pore network model is constructed which accounts for the pore size distributions and low pore connectivity in the shale matrix. We have simulated gas flow through the network to estimate permeability of the shale. This model considers Knudsen diffusion and the effects of gas slippage on permeability. Further parametric study shows that the apparent permeability primarily depends on the reservoir pressure, pore coordination number and porosity.

Changes in Pore Size Distribution upon Thermal Cycling of TATB-based Explosives Measured by Ultra-Small Angle X-Ray Scattering

2006 ◽  
Vol 31 (6) ◽  
pp. 466-471 ◽  
Author(s):  
Trevor M. Willey ◽  
Tony van Buuren ◽  
Jonathan R. I. Lee ◽  
George E. Overturf ◽  
John H. Kinney ◽  
...  
Keyword(s):  
Thermal Cycling ◽  
Pore Size Distribution ◽  
Pore Size ◽  
Size Distribution ◽  
Small Angle ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

scholarly journals Pore size distributions in low-k dielectric thin films from X-ray porosimetry

2002 ◽  
Vol 40 (19) ◽  
pp. 2170-2177 ◽  
Author(s):  
Hae-Jeong Lee ◽  
Christopher L. Soles ◽  
Da-Wei Liu ◽  
Barry J. Bauer ◽  
Wen-Li Wu
Keyword(s):  
Thin Films ◽  
Pore Size ◽  
Size Distributions ◽  
Dielectric Thin Films ◽  
X Ray ◽  
Pore Size Distributions ◽  
Low K
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