Controlled deposition of wedge-shaped profiles for thin (∼10Å) layers by pulsed laser deposition
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ABSTRACTA method yielding precisely controlled thickness profiles in thin-film growth is necessary for continuous compositional spread techniques. While multiple approaches have been introduced and successfully tested, some specific applications require the use of very thin “wedge”-type profiles (∼10 Å at the thickest point), while at the same time yielding lateral sample sizes of several centimeters. Here we introduce the basic principles of a pulsed-laser deposition based approach utilizing the translation of the substrate behind a slit-shaped aperture and demonstrate by simple calculations that this method can satisfy these requirements.
2019 ◽
Vol 45
(10)
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pp. 13138-13143
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2012 ◽
Vol 25
(8)
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pp. 084015
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2003 ◽
Vol 42
(Part 1, No. 5A)
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pp. 2856-2857
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2018 ◽
Vol 31
(5)
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pp. 055017
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1998 ◽
Vol 16
(4)
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pp. 2093-2098
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2016 ◽
Vol 388
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pp. 684-690
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