scholarly journals A synchrotron-based kilowatt-level radiation source for EUV lithography

2021 ◽  
Author(s):  
Bocheng Jiang ◽  
Chao Feng ◽  
Changliang Li ◽  
Zhenghe Bai ◽  
Weishi Wan ◽  
...  
Keyword(s):  
Radiation Source ◽  
Electron Bunch ◽  
State Of The Art ◽  
Average Power ◽  
Coherent Radiation ◽  
The State ◽  
Angular Dispersion ◽  
Laser Technologies ◽  
Euv Lithography

Abstract A compact damping ring with limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the ring is modulated by a 257nm wavelength laser with the help of the angular dispersion induced micro-bunching method [C. Feng and Z. Zhao, Sci. Rep. 7, 4724 (2017)]. Coherent radiation at 13.5 nm with an average power of about 2.5 kW can be achieved with the state-of-the-art accelerator and laser technologies.

Practical Picture Processing

1974 ◽  
Vol 32 ◽  
pp. 338-339
Author(s):  
T. A. Welton
Keyword(s):  
Radiation Damage ◽  
Coherence Length ◽  
Spatial Information ◽  
State Of The Art ◽  
Coherent Radiation ◽  
The State ◽  
Energy Spread ◽  
Electron Micrograph ◽  
Picture Processing ◽  
Molecular Skeleton

Various authors have emphasized the spatial information resident in an electron micrograph taken with adequately coherent radiation. In view of the completion of at least one such instrument, this opportunity is taken to summarize the state of the art of processing such micrographs. We use the usual symbols for the aberration coefficients, and supplement these with £ and 6 for the transverse coherence length and the fractional energy spread respectively. He also assume a weak, biologically interesting sample, with principal interest lying in the molecular skeleton remaining after obvious hydrogen loss and other radiation damage has occurred.

Hypothesis-Evidence Coordination: The State of the Art

2003 ◽  
Vol 48 (6) ◽  
pp. 826-829 ◽  
Author(s):  
Eric Amsel
Keyword(s):  
State Of The Art ◽  
The State

The State of the Art

1968 ◽  
Vol 13 (9) ◽  
pp. 479-480
Author(s):  
LEWIS PETRINOVICH
Keyword(s):  
State Of The Art ◽  
The State

Needs Assessment: The State of the Art

1984 ◽  
Vol 29 (5) ◽  
pp. 426-428
Author(s):  
Anthony R. D'Augelli
Keyword(s):  
Needs Assessment ◽  
State Of The Art ◽  
The State

Biofeedback: The State of the Art

1991 ◽  
Vol 36 (2) ◽  
pp. 140-140
Author(s):  
John A. Corson
Keyword(s):  
State Of The Art ◽  
The State

Health Informatics Education in the Third World

1989 ◽  
Vol 28 (04) ◽  
pp. 270-272 ◽  
Author(s):  
O. Rienhoff
Keyword(s):  
Developing Countries ◽  
Health Informatics ◽  
Third World ◽  
State Of The Art ◽  
The State ◽  
Collaboration Network ◽  
Educational Tools ◽  
The Third ◽  
The Third World

Abstract:The state of the art is summarized showing many efforts but only few results which can serve as demonstration examples for developing countries. Education in health informatics in developing countries is still mainly dealing with the type of health informatics known from the industrialized world. Educational tools or curricula geared to the matter of development are rarely to be found. Some WHO activities suggest that it is time for a collaboration network to derive tools and curricula within the next decade.

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