scholarly journals Development of a Micro Hole Measuring System Using an Optical Fiber Probe (1st Report)

2009 ◽  
Vol 75 (12) ◽  
pp. 1476-1481 ◽  
Author(s):  
Hiroshi MURAKAMI ◽  
Akio KATSUKI ◽  
Hiromichi ONIKURA ◽  
Takao SAJIMA ◽  
Eiji KONDO
Keyword(s):  
Optical Fiber ◽  
Measuring System ◽  
Fiber Probe ◽  
Optical Fiber Probe ◽  
Micro Hole

scholarly journals Development of a System to Measure Micro Hole Form Accuracy Using an Optical Fiber Probe (2nd Report)

2010 ◽  
Vol 76 (8) ◽  
pp. 950-954 ◽  
Author(s):  
Hiroshi MURAKAMI ◽  
Akio KATSUKI ◽  
Hiromichi ONIKURA ◽  
Takao SAJIMA ◽  
Norio KAWAGOISHI ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Fiber Probe ◽  
Form Accuracy ◽  
Optical Fiber Probe ◽  
Micro Hole

scholarly journals Development of a System for Measuring Micro Hole Accuracy Using an Optical Fiber Probe

2010 ◽  
Vol 4 (5) ◽  
pp. 995-1004 ◽  
Author(s):  
Hiroshi MURAKAMI ◽  
Akio KATSUKI ◽  
Hiromichi ONIKURA ◽  
Takao SAJIMA ◽  
Norio KAWAGOISHI ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Fiber Probe ◽  
Optical Fiber Probe ◽  
Micro Hole

An Optical Fiber Probe for 3-D Micro Metrology

2010 ◽  
Vol 447-448 ◽  
pp. 524-528
Author(s):  
Hiroshi Murakami ◽  
Akio Katsuki ◽  
Hiromichi Onikura ◽  
Takao Sajima ◽  
Norio Kawagoishi ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Measuring System ◽  
Design Parameters ◽  
Micro Structure ◽  
Fiber Probe ◽  
Optical Fiber Probe ◽  
Experimental Apparatus ◽  
Simulation Results ◽  
Structure Measurement ◽  
Better Than

This paper presents a system of 3-D micro structure measurement that uses an optical fiber probe of 5 µm in diameter. The probe is deflected when it comes into contact with a measured surface, and this deflection is measured optically. In this research, we optimize design parameters of optical system using ray tracing, and a prototype of the measuring system is fabricated on trial to verify the simulation results. Then, its measuring accuracies are examined by using the basic experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 10 nm. Also, the utility of this system is confirmed by measuring the shape of a 600 µm diameter ruby sphere.

Dual-parameter optical fiber probe based on a three-beam Fabry-Perot interferometer

2020 ◽  
pp. 1-1
Author(s):  
Wen Zhang ◽  
Haoye Li ◽  
Lianqing Zhu ◽  
Mingli Dong ◽  
Fanyong Meng
Keyword(s):  
Optical Fiber ◽  
Fiber Probe ◽  
Optical Fiber Probe ◽  
Fabry Perot

scholarly journals Infrared Hollow Optical Fiber Probe for Localized Carbon Dioxide Measurement in Respiratory Tracts

Sensors ◽  
2018 ◽  
Vol 18 (4) ◽  
pp. 995 ◽  
Author(s):  
Takashi Katagiri ◽  
Kyosuke Shibayama ◽  
Takeru Iida ◽  
Yuji Matsuura
Keyword(s):  
Carbon Dioxide ◽  
Optical Fiber ◽  
Fiber Probe ◽  
Optical Fiber Probe ◽  
Carbon Dioxide Measurement

Development of a dual optical fiber probe for the hydrodynamic investigation of a horizontal annular drive gas/liquid ejector

2017 ◽  
Vol 56 ◽  
pp. 45-55 ◽  
Author(s):  
Aliyu Musa Aliyu ◽  
Yoon Kee Kim ◽  
Seong Hwan Choi ◽  
Joo Ha Ahn ◽  
Kyung Chun Kim
Keyword(s):  
Optical Fiber ◽  
Fiber Probe ◽  
Optical Fiber Probe
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