Special issue on semiconductors - Materials and processing technologies. Clean wafer transportation system - Linear motor drive system.
1985 ◽
Vol 51
(7)
◽
pp. 1336-1339
Keyword(s):
Output Feedback Neural Network Adaptive Robust Control With Application to Linear Motor Drive System
2006 ◽
Vol 128
(2)
◽
pp. 227
◽
Keyword(s):
1990 ◽
Vol 110
(1)
◽
pp. 23-31
◽
2008 ◽
Vol 128
(3)
◽
pp. 259-266
◽
Keyword(s):
Keyword(s):
2020 ◽
Vol 13
(8)
◽
pp. 1129-1134
Keyword(s):
Keyword(s):