scholarly journals Measurement of Micro-Roughness on Si Wafer Surface Using System for Measuring Particle Diameter by Light-Scattering Method

2004 ◽  
Vol 70 (5) ◽  
pp. 700-704
Author(s):  
Satoshi SASAKI ◽  
Hiroshi AN ◽  
Katsuyoshi ENDO ◽  
Yuzo MORI
Keyword(s):  
Light Scattering ◽  
Particle Diameter ◽  
Wafer Surface ◽  
Scattering Method ◽  
Si Wafer

scholarly journals Measurement of Nanodefects on Si Wafer Surface Using System for Measuring Particle Diameter by Light-Scattering Method.

2002 ◽  
Vol 68 (9) ◽  
pp. 1200-1205 ◽  
Author(s):  
Satoshi SASAKI ◽  
Hiroshi AN ◽  
Yuzo MORI ◽  
Tosihiko KATAOKA ◽  
Katsuyoshi ENDO ◽  
...  
Keyword(s):  
Light Scattering ◽  
Particle Diameter ◽  
Wafer Surface ◽  
Scattering Method ◽  
Si Wafer

scholarly journals Measurement of Nano-fine Particles on Si Wafer Surface by Laser Light Scattering Method.

2001 ◽  
Vol 67 (11) ◽  
pp. 1818-1823 ◽  
Author(s):  
Satoshi SASAKI ◽  
Hiroshi AN ◽  
Yuzo MORI ◽  
Tosihiko KATAOKA ◽  
Katsuyoshi ENDO ◽  
...  
Keyword(s):  
Light Scattering ◽  
Fine Particles ◽  
Laser Light ◽  
Laser Light Scattering ◽  
Wafer Surface ◽  
Scattering Method ◽  
Si Wafer

scholarly journals Measurement of Ultra Fine Defects on the Si Wafer Surface Using a Laser Light Scattering Method.

2002 ◽  
Vol 68 (10) ◽  
pp. 1337-1341 ◽  
Author(s):  
Haruyuki INOUE ◽  
Toshihiko KATAOKA ◽  
Yasushi OSHIKANE ◽  
Katsuyoshi ENDO ◽  
Yuzo MORI ◽  
...  
Keyword(s):  
Light Scattering ◽  
Laser Light ◽  
Laser Light Scattering ◽  
Wafer Surface ◽  
Scattering Method ◽  
Si Wafer

scholarly journals Measurement of Ultra Fine Particles on the Si Wafer Surface Using a Laser Light Scattering Method.

1997 ◽  
Vol 63 (8) ◽  
pp. 1117-1121 ◽  
Author(s):  
Haruyuki INOUE ◽  
Toshihiko KATAOKA ◽  
Katsuyoshi ENDO ◽  
Yasushi OSHIKANE ◽  
Yuzo MORI ◽  
...  
Keyword(s):  
Light Scattering ◽  
Fine Particles ◽  
Laser Light ◽  
Laser Light Scattering ◽  
Wafer Surface ◽  
Scattering Method ◽  
Ultra Fine Particles ◽  
Si Wafer

scholarly journals Inspection of Ultra Fine Particles on the Si Wafer Surface Using a Laser Light Scattering Method.

2002 ◽  
Vol 68 (2) ◽  
pp. 264-268
Author(s):  
Haruyuki INOUE ◽  
Toshihiko KATAOKA ◽  
Katsuyoshi ENDO ◽  
Yasushi OSHIKANE ◽  
Yuzo MORI ◽  
...  
Keyword(s):  
Light Scattering ◽  
Fine Particles ◽  
Laser Light ◽  
Laser Light Scattering ◽  
Wafer Surface ◽  
Scattering Method ◽  
Ultra Fine Particles ◽  
Si Wafer

scholarly journals Observation of Oxide-film Step with Very Small Height on Si Wafer Surface Using a Laser Scattering Method

2006 ◽  
Vol 72 (11) ◽  
pp. 1363-1367
Author(s):  
Haruyuki INOUE ◽  
Toshihiko KATAOKA ◽  
Yoshihiro NAGAO ◽  
Yasushi OSHIKANE ◽  
Motohiro NAKANO ◽  
...  
Keyword(s):  
Oxide Film ◽  
Wafer Surface ◽  
Scattering Method ◽  
Laser Scattering ◽  
Small Height ◽  
Si Wafer

560 Wafer surface inspection using laser light scattering method

2006 ◽  
Vol 2006 (0) ◽  
pp. 143-144
Author(s):  
Tsutom KOMOTO ◽  
Tasuku OSADA ◽  
Terunobu KUJI ◽  
Shinsaku HAGIWARA
Keyword(s):  
Light Scattering ◽  
Laser Light ◽  
Laser Light Scattering ◽  
Wafer Surface ◽  
Surface Inspection ◽  
Scattering Method
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