Picosecond Time-Resolved LADA Integrated with a Solid Immersion Lens on a Laser Scanning Microscope
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Abstract We present an upgraded time-resolved LADA system, with a 25ps pulsed laser, integrated into a commercial laser scanning microscope used in failure analysis. We demonstrate the use of this system on 14nm/16nm finfet devices.
1994 ◽
Vol 24
(1-4)
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pp. 401-408
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1988 ◽
Vol 46
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pp. 96-97
2006 ◽
Vol 20
(4)
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pp. 435-439
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2017 ◽
Vol 10
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pp. 1526-1537
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2002 ◽
Vol 51
(4)
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pp. 215-223
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