Time-resolved investigations of n-MOS devices by capacitive coupling in a laser scanning microscope

1994 ◽  
Vol 24 (1-4) ◽  
pp. 401-408 ◽  
Author(s):  
K. Hempel ◽  
H. Bergner
Author(s):  
Kent Erington ◽  
John Asquith ◽  
Dan Bodoh

Abstract We describe a technique that is used to obtain timing information from laser assisted device alteration (LADA). The technique uses a non-pulsed laser scanning microscope to obtain timing information with a temporal resolution on the order of microseconds. Custom software is used to extract the timing information from the LADA images.


Author(s):  
K. Hempel ◽  
G. Sargsjan ◽  
H. Bergner

Abstract Internal IC probing has become an important tool for failure analysis and defect localization. Optical stimulation of logical transients enables the investigation of electrical pulse propagation through IC-regions which are not directly connected to an external input. The signal detection should be as directly as possible to avoid misinterpretation of experimental results, especially for time-resolved measurements. This paper describes the implementation of a capacitive coupling technique on a laser scanning microscope and on a needle prober. Results of static and time-resolved measurements are presented and compared to those obtained by OBIC measurements.


Author(s):  
Dan Bodoh ◽  
Kent Erington

Abstract In this paper, we describe improved hardware to connect a semiconductor tester or applications board to a laser scanning microscope (LSM) for performing dynamic laser stimulation (DLS). The hardware, called DXGlue, simplifies the DLS workflow and enables new applications. We describe its precise monitoring of the fail rate and fail mode, its use for time resolved DLS and the enabling of long test loops with short laser dwell times.


Author(s):  
Kris Dickson ◽  
Kent Erington ◽  
Dan Bodoh ◽  
Keith Serrels ◽  
Charles Petri ◽  
...  

Abstract We present an upgraded time-resolved LADA system, with a 25ps pulsed laser, integrated into a commercial laser scanning microscope used in failure analysis. We demonstrate the use of this system on 14nm/16nm finfet devices.


Author(s):  
Thomas M. Jovin ◽  
Michel Robert-Nicoud ◽  
Donna J. Arndt-Jovin ◽  
Thorsten Schormann

Light microscopic techniques for visualizing biomolecules and biochemical processes in situ have become indispensable in studies concerning the structural organization of supramolecular assemblies in cells and of processes during the cell cycle, transformation, differentiation, and development. Confocal laser scanning microscopy offers a number of advantages for the in situ localization and quantitation of fluorescence labeled targets and probes: (i) rejection of interfering signals emanating from out-of-focus and adjacent structures, allowing the “optical sectioning” of the specimen and 3-D reconstruction without time consuming deconvolution; (ii) increased spatial resolution; (iii) electronic control of contrast and magnification; (iv) simultanous imaging of the specimen by optical phenomena based on incident, scattered, emitted, and transmitted light; and (v) simultanous use of different fluorescent probes and types of detectors.We currently use a confocal laser scanning microscope CLSM (Zeiss, Oberkochen) equipped with 3-laser excitation (u.v - visible) and confocal optics in the fluorescence mode, as well as a computer-controlled X-Y-Z scanning stage with 0.1 μ resolution.


2017 ◽  
Vol 10 (11) ◽  
pp. 1526-1537 ◽  
Author(s):  
Y. X. Li ◽  
V. Gautam ◽  
A. Brüstle ◽  
I. A. Cockburn ◽  
V. R. Daria ◽  
...  

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