ABSTRACTNi/Ti multilayered thin films can be efficient neutron guides and are therefore of great interest in neutron optics. Ni/Ti and NiC/Ti multilayers with various layer thicknesses were fabricated by magnetron sputtering and characterized by high resolution transmission electron microscopy (TEM). The TEM studies, performed on cross-sectional specimens, revealed that both kinds of layers were textured and snowed coherence in the growth direction. The presence of a 2 nra thick amorphous zone at the Ni/Ti interface in the carbon free thin films was also confirmed. On the contrary, sharp interfaces were obtained in NiC/Ti multilayers. The fine structure of the different layers will also be reported.