scholarly journals Measurement of Film Structure Using Time-Frequency-Domain Fitting and White-Light Scanning Interferometry

Machines ◽  
2021 ◽  
Vol 9 (12) ◽  
pp. 336
Author(s):  
Xinyuan Guo ◽  
Tong Guo ◽  
Lin Yuan

A new technique is proposed for measuring film structure based on the combination of time- and frequency-domain fitting and white-light scanning interferometry. The approach requires only single scanning and employs a fitting method to obtain the film thickness and the upper surface height in the frequency and time domains, respectively. The cross-correlation function is applied to obtain the initial value of the upper surface height, thereby making the fitting process more accurate. Standard films (SiO2) with different thicknesses were measured to verify the accuracy and reliability of the proposed method, and the three-dimensional topographies of the upper and lower surfaces of the films were reconstructed.

2017 ◽  
Vol 24 (11) ◽  
pp. 1112-1124
Author(s):  
Shengqing Lv ◽  
Yimin Chen ◽  
Zeyu Li ◽  
Jiahui Lu ◽  
Mingke Gao ◽  
...  

2015 ◽  
Vol 738-739 ◽  
pp. 904-910
Author(s):  
Li Jian ◽  
Li Hua Lei ◽  
Dong Sheng Li ◽  
Yun Xia Fu ◽  
Yuan Li ◽  
...  

White light interference technique for topography measurement effectively avoids phase ambiguity in phase-shifting interferometry. The spatial frequency domain algorithm based on scanning white light interference technique has the advantage of insensitivity to noise and higher calculation accuracy compared with other methods. The white light interference sensor is constructed based on nano positioning and nano measuring machine (NMM), the calibrated step height standard of 100±3nm is measured. The spatial frequency domain algorithm is adopted for data processing, the repetitive test result of 97.9nm and standard deviation of 0.48nm are achieved. To verify the measuring ability of complex device, the number ‘242’ on ink box is measured and three-dimensional reconstruction is conducted. The high precision and traceable measurements of micro/nano scale step height standard and complex devices are realized by the white light interference system based on NMM with steady frequency laser interferometer built-in.


Author(s):  
EDO BAGUS PRASTIKA ◽  
Atsushi Imori ◽  
Tomohiro Kawashima ◽  
Yoshinobu Murakami ◽  
Naohiro HOZUMI ◽  
...  

2016 ◽  
Vol 2016 ◽  
pp. 1-7 ◽  
Author(s):  
Qinghua Zeng ◽  
Shanshan Gu ◽  
Jianye Liu ◽  
Sheng Liu ◽  
Weina Chen

It is difficult to analyze the nonstationary gyro signal in detail for the Allan variance (AV) analysis method. A novel approach in the time-frequency domain for gyro signal characteristics analysis is proposed based on the empirical mode decomposition and Allan variance (EMDAV). The output signal of gyro is decomposed by empirical mode decomposition (EMD) first, and then the decomposed signal is analyzed by AV algorithm. Consequently, the gyro noise characteristics are demonstrated in the time-frequency domain with a three-dimensional (3D) manner. Practical data of fiber optic gyro (FOG) and MEMS gyro are processed by the AV method and the EMDAV algorithm separately. The results indicate that the details of gyro signal characteristics in different frequency bands can be described with the help of EMDAV, and the analysis dimensions are extended compared with the common AV. The proposed EMDAV, as a complementary tool of the AV, which provides a theoretical reference for the gyro signal preprocessing, is a general approach for the analysis and evaluation of gyro performance.


2016 ◽  
Vol 25 (3) ◽  
pp. 289-293
Author(s):  
Anda Carmen Achim ◽  
Stefan Cristian Vesa ◽  
Eugen Dumitru

Background: Diagnosis of portal hypertensive gastropathy (PHG) is based on endoscopic criteria. I-scan technology, a new technique of virtual chromoendoscopy, increases the diagnostic accuracy for lesions in the gastrointestinal tract. Aim: To establish the role of i-scan endoscopy in the diagnosis of PHG. Method: In this prospective study, endoscopic examination was conducted first by using white light and after that i-scan 1 and i-scan 2 technology in a group of 50 consecutive cirrhotic patients. The endoscopic diagnostic criteria for PHG followed the Baveno criteria. The interobserver agreement between white light endoscopy and i-scan endoscopy was determined using Cohen’s kappa statistics. Results: Forty-five of the 50 patients met the diagnostic criteria for PHG when examined by i-scan endoscopy and 39 patients were diagnosed with PHG by white light endoscopy. The strength of agreement between the two methods for the diagnosis of PHG was moderate (k=0.565; 95%CI 0.271-0.859; p<0.001). I-scan 1 classified the mosaic pattern better than classic endoscopy; i-scan 2 described better the red spots. Conclusion: I-scan examination increased the diagnostic sensitivity of PHG. The diagnostic criteria (mosaic pattern and red spots) were easier to observe endoscopically using i-scan than in white light.Abbreviations: FICE: Fuji Intelligent chromoendoscopy; GAVE: gastric antral vascular ectasia; NBI: narrow band imaging; PHG: portal hypertensive gastropathy; PHT: portal hypertension; UGIB: upper gastrointestinal bleeding.


2021 ◽  
Vol 177 ◽  
pp. 107914
Author(s):  
Thomas Padois ◽  
Jeoffrey Fischer ◽  
Con Doolan ◽  
Olivier Doutres

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