High Aspect Ratio Nanoimprint Mold-Cavity Filling and Stress Simulation Based on Finite-Element Analysis
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2008 ◽
Vol 17
(3)
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pp. 170-181
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2017 ◽
Vol 270
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pp. 012023
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2019 ◽
Vol 234
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pp. 15-25
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2014 ◽
Vol 716-717
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pp. 1643-1647
2016 ◽
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2014 ◽
Vol 50
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pp. 1-5
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