High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator
2017 ◽
Vol 1
(4)
◽
pp. 379
◽
J. Wang
◽
C. Zhao
◽
D. X. Han
◽
X. F. Jin
◽
S. M. Zhang
◽
...
2016 ◽
Vol 136
(8)
◽
pp. 343-347
◽
Ryo Sakai
◽
Hiroaki Imai
◽
Masayuki Sohgawa
◽
Takashi Abe
Shiro Watanabe
◽
Yuichi Murozaki
◽
Yoshiaki Sato
◽
Kazuya Honbe
◽
Fumihito Arai
2000 ◽
Vol 41
(2)
◽
pp. 511-522
◽
I Sugimoto
◽
M Nakamura
◽
N Kasai
◽
T Katoh
M. Ferrari
◽
V. Ferrari
◽
K.K. Kanazawa
Kevin Rosenziveig
◽
Jeremy Bon
◽
Philippe Abbe
◽
Valerie Soumann
◽
Remo Giust
◽
...
Xiaogang Deng
◽
Shubin Wang
◽
Shengjie Jing
◽
Xianri Huang
◽
Weixing Huang
◽
...
2009 ◽
Vol 9
(12)
◽
pp. 9544-9558
◽
Yong Kweon Suh
◽
Byoung Chul Kim
◽
Young Han Kim
1999 ◽
Vol 74
(3)
◽
pp. 466-468
◽
Jong Min Kim
◽
Sang Mok Chang
◽
Hiroshi Muramatsu
2016 ◽
Vol 52
(5)
◽
pp. 936-946
◽
A. I. Marshakov
◽
A. A. Rybkina
◽
L. B. Maksaeva
◽
M. A. Petrunin
◽
A. P. Nazarov