Ablation threshold and crater morphology of amorphous and crystalline SiO2 glass for extreme ultraviolet femtosecond pulses

2020 ◽  
Vol 59 (12) ◽  
pp. 122004
Author(s):  
T. Shibuya ◽  
K. Sakaue ◽  
H. Ogawa ◽  
T.-H. Dinh ◽  
D. Satoh ◽  
...  
2018 ◽  
Vol 36 (3) ◽  
pp. 293-307 ◽  
Author(s):  
Jaroslav Straus ◽  
Karel Kolacek ◽  
Jiri Schmidt ◽  
Oleksandr Frolov ◽  
Monika Vilemova ◽  
...  

AbstractThe experimental study of damage to tungsten (W), molybdenum (Mo), and silicon carbide (SiC) surfaces induced by focused extreme ultraviolet laser radiation (λ ~ 47 nm/~1.5 ns/21–40 µJ) is presented. It was found that W and Mo behaved similarly: during the first shot, the damaged area is covered by melted and re-solidified material, in which circular holes appear – residua of just opened pores/bubbles, from which pressurized gas/vapors escaped. Next cracks and ruptures appear and the W has a tendency to delaminate its surface layer. Contrary, single-crystalline SiC has negligible porosity and sublimates; therefore, no escape of “pressurized” gas and no accompanying effects take place. Moreover, SiC at sublimating temperature decomposes to elements; therefore, the smooth crater morphology can be related to local laser energy density above ablation threshold. When more shots are accumulated, in all three investigated materials, the crater depth increases non-linearly with number of these shots. The surface morphology was investigated by an atomic force microscope, the surface structure was imaged by a scanning electron microscope (SEM), and the structure below the surface was visualized by SEM directed into a trench that is milled by focused ion beam. Additionally, structural changes in SiC were revealed by Raman spectroscopy.


2018 ◽  
Vol 26 (14) ◽  
pp. 18664 ◽  
Author(s):  
H. Mustafa ◽  
R. Pohl ◽  
T. C. Bor ◽  
B. Pathiraj ◽  
D. T. A. Matthews ◽  
...  

2018 ◽  
Vol 113 (17) ◽  
pp. 171902 ◽  
Author(s):  
Tatsunori Shibuya ◽  
Takashi Takahashi ◽  
Kazuyuki Sakaue ◽  
Thanh-Hung Dinh ◽  
Hiroyuki Hara ◽  
...  

2004 ◽  
Vol 69 (5) ◽  
Author(s):  
P. O’Keeffe ◽  
R. López-Martens ◽  
J. Mauritsson ◽  
A. Johansson ◽  
A. L’Huillier ◽  
...  

2016 ◽  
Vol 122 (3) ◽  
Author(s):  
X. W. Wang ◽  
R. Buividas ◽  
F. Funabiki ◽  
P. R. Stoddart ◽  
H. Hosono ◽  
...  

Author(s):  
T.R. Dinger ◽  
G. Thomas

The use of Si3N4, alloys for high temperature, high stress structural applications has prompted numerous studies of the oxynitride glasses which exist as intergranular phases in their microstructures. Oxynitride glasses have been investigated recently in their bulk form in order to understand their crystallization behavior for subsequent Si3N4 applications and to investigate their worth as glass-ceramic precursors. This research investigates the crystallization sequence of a glass having a normalized composition of Y26Si30Al11 ON11 and lying in the A1N-Y2O3-SiO2 section of the Y-Si-Al-O-N system. Such glasses exist as intergranular phases in the technologically important Y2O3/Al2O3-fluxed Si3N4 alloys.


2018 ◽  
Vol 189 (03) ◽  
pp. 323-334 ◽  
Author(s):  
D.B. Abramenko ◽  
P.S. Antsiferov ◽  
D.I. Astakhov ◽  
Aleksandr Yu. Vinokhodov ◽  
Il'ya Yu. Vichev ◽  
...  

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