Effect of Plused Negative Bias on Nucleation and Morphological Evolution of ZnO Films Deposited by Reactive Radio-frequency Magnetron Sputtering

2009 ◽  
Vol 24 (3) ◽  
pp. 602-606 ◽  
Author(s):  
Wei-Jia FU ◽  
Zhi-Wen LIU ◽  
Jian-Feng GU ◽  
Ming LIU ◽  
Qing-Yu ZHANG
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Morphological Evolution ◽  
Radio Frequency Magnetron ◽  
Zno Films ◽  
Negative Bias ◽  
Radio Frequency Magnetron Sputtering

scholarly journals Two-step growth of ZnO films deposited by reactive radio-frequency magnetron sputtering on Si(001) substrate

2007 ◽  
Vol 56 (4) ◽  
pp. 2369
Author(s):  
Gu Jian-Feng ◽  
Liu Zhi-Wen ◽  
Liu Ming ◽  
Fu Wei-Jia ◽  
Ma Chun-Yu ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Step Growth

Effects of thickness and annealing on the properties of Ti-doped ZnO films by radio frequency magnetron sputtering

2011 ◽  
Vol 11 (1) ◽  
pp. S185-S190 ◽  
Author(s):  
Hung-Peng Chang ◽  
Fang-Hsing Wang ◽  
Jen-Chi Chao ◽  
Chia-Cheng Huang ◽  
Han-Wen Liu
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Doped Zno

scholarly journals Structure and Composition of ZnO Films Prepared by Radio-Frequency Magnetron Sputtering

2002 ◽  
Vol 122 (1) ◽  
pp. 100-106
Author(s):  
Tomoaki Sugawara ◽  
Isao Shimono ◽  
Hisashi Fukuda ◽  
Jiro Tsujino ◽  
Norio Homma ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Films ◽  
Radio Frequency Magnetron Sputtering
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