Three degrees of freedom modeling and adaptive neural network control for long-stroke wafer stage

2015 ◽  
Vol 23 (1) ◽  
pp. 132-140
Author(s):  
王一光 WANG Yi-guang ◽  
陈兴林 CHEN Xing-lin ◽  
李晓杰 LI Xiao-jie
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