Simulation of the Effect of Power on the Properties of Si-Based Films Deposited by PECVD

2011 ◽  
Vol 415-417 ◽  
pp. 1859-1862 ◽  
Author(s):  
Guo Jun Jin ◽  
Gui Qin Li ◽  
Yi Sun ◽  
Li Xin Lu ◽  
Song Lin ◽  
...  
Keyword(s):  
Thin Film ◽  
Fluid Dynamics ◽  
Computational Fluid Dynamics ◽  
Deposition Rate ◽  
Reaction Chamber ◽  
Dynamics Simulation ◽  
Two Dimensional ◽  
Computational Fluid Dynamics Simulation ◽  
Dimensional Modeling

Two-dimensional modeling and the computational fluid dynamics simulation are performed to investigate the deposition rate and the uniformity of the thin film under different power in PECVD reaction chamber using 13.56 MHz frequency. The results of the simulation show that as the power increased, the deposition rate of the thin film first increased gradually and then saturated, but the changes of power have little effect on uniformity.

scholarly journals Computational fluid dynamics investigation into flow behavior and acoustic mechanisms at the trailing edge of an airfoil

2018 ◽  
Vol 49 (1) ◽  
pp. 20-31 ◽  
Author(s):  
Beren R Jackson ◽  
Sam M Dakka
Keyword(s):  
Fluid Dynamics ◽  
Computational Fluid Dynamics ◽  
Power Level ◽  
Angle Of Attack ◽  
Acoustic Power ◽  
Dynamics Simulation ◽  
Turbulent Intensity ◽  
Two Dimensional ◽  
Computational Fluid Dynamics Simulation ◽  
Trailing Edge

Airfoil self-noise or trailing edge noise and shear noise were investigated computationally for a NACA 0012 airfoil section, focusing on noise mechanisms at the trailing edge to identify and understand sources of noise production using ANSYS Fluent. A two-dimensional computational fluid dynamics simulation has been performed for 0°, 8°, and 16° airfoil angles of attack capturing surface pressure contours, contours of turbulent intensity, contours of surface acoustic power level, vorticity magnitude levels across the airfoil profile, and x- and y-directional self-noise and shear noise sources across the airfoil profile. The results indicate that pressure gradients at the upper surface do increase as the angle of attack increases, which is a measure of vortices near the surface of the trailing edge associated with turbulence cease as the boundary layer begins to separate. Comparison of the turbulent intensity contours with surface acoustic power level contours demonstrated direct correlation between the energy contributed by turbulent structures (i.e. vortices) and the level of noise measured at the surface and within the boundary layer of the airfoil. As angle of attack is increased, both x and y sources have the same trends; however, y sources (perpendicular to the free-stream flow) appear to have a bigger impact as angle of attack is increased. Furthermore, as the angle of attack increased, shear noise contributes less and less energy further downstream of the airfoil and becomes dominated by noise energy from vortical structures within turbulence. The two-dimensional computational fluid dynamics simulation revealed that pressure, turbulent intensity, and surface acoustic power contours further corroborated the previously tested noise observations phenomena at the trailing edge of the airfoil.

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