Microcrystalline Silicon Thin Films and Triple-Junction Solar Cells

2012 ◽  
Vol 468-471 ◽  
pp. 1912-1915
Author(s):  
Hui Zhi Ren ◽  
Ying Zhao ◽  
Xiao Dan Zhang ◽  
Hong Ge ◽  
Zong Pan Wang
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Triple Junction ◽  
Microcrystalline Silicon ◽  
Large Area ◽  
High Quality ◽  
Area Efficiency ◽  
Silicon Thin Films ◽  
Deposition Parameters ◽  
Area Deposition

We report on microcrystalline silicon thin films and a-Si:H/a-SiGe:H/μc-Si:H triple-junction p-i-n solar cells deposited on large-area glass substrate. Microcrystalline silicon (μc-Si:H) bottom cells were deposited at a VHF-PECVD deposition system with 40.68MHz. It is necessary to develop the uniformity of μc-Si:H thin films for large-area deposition of high-quality triple-junction solar cells. By optimizing the deposition parameters, μc-Si:H thin films have been obtained with good thickness and very good crystalline volume fractions uniformity over the whole substrates area. The triple-junction module have been successful fabricated. The best module on 0.79 m2 size substrates has an initial total-area efficiency of 8.35%.

Large-Area Hydrogenated Amorphous and Microcrystalline Silicon Double-Junction Solar Cells

2004 ◽  
Vol 808 ◽  
Author(s):  
Baojie Yan ◽  
Guozhen Yue ◽  
Arindam Banerjee ◽  
Jeffrey Yang ◽  
Subhendu Guha
Keyword(s):  
Solar Cells ◽  
Deposition Time ◽  
High Rate ◽  
Microcrystalline Silicon ◽  
Large Area ◽  
Area Efficiency ◽  
Rf Glow Discharge ◽  
Double Junction ◽  
Junction Structure ◽  
Hydrogenated Amorphous

ABSTRACTHydrogenated amorphous silicon (a-Si:H) and hydrogenated microcrystalline silicon ( c-Si:H) double-junction solar cells were deposited on a large-area substrate using a RF glow discharge technique at various rates. The thickness uniformity for both a-Si:H and c-Si:H is well within ± 10% and the reproducibility is very good. Preliminary results from the large-area a-Si:H/m c-Si:H double-junction structures show an initial aperture-area efficiency of 11.8% and 11.3%, respectively, for 45 cm2 and 461 cm2 size un-encapsulated solar cells. The 11.3% cell became 10.6% after encapsulation and stabilized at 9.5% after prolonged light soaking under 100 mW/cm2 of white light at 50°C. High rate deposition of the c-Si:H layer in the bottom cell was made using the high-pressure approach. An initial active-area (0.25 cm2) efficiency of 11.3% was achieved using an a-Si:H/m c-Si:H double-junction structure with 50 minutes of c-Si:H deposition time.

scholarly journals Fabrication of High-Quality Boron-Doped Microcrystalline Silicon Thin Films on Several Types of Substrates

2012 ◽  
Vol 25 ◽  
pp. 34-42 ◽  
Author(s):  
Yunfeng Yin ◽  
Jidong Long ◽  
Selvaraj Venkataraj ◽  
Juan Wang ◽  
Armin G. Aberle
Keyword(s):  
Thin Films ◽  
Microcrystalline Silicon ◽  
High Quality ◽  
Silicon Thin Films ◽  
Boron Doped

scholarly journals Performance optimization of p-i-n type microcrystalline silicon thin films solar cells deposited in single chamber

2010 ◽  
Vol 59 (2) ◽  
pp. 1344
Author(s):  
Zhang Xiao-Dan ◽  
Sun Fu-He ◽  
Xu Sheng-Zhi ◽  
Wang Guang-Hong ◽  
Wei Chang-Chun ◽  
...  
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Performance Optimization ◽  
Microcrystalline Silicon ◽  
Single Chamber ◽  
Silicon Thin Films

Low-Temperature Plasma-Processed Microcrystalline Silicon Thin Films for Large-Area Electronics

2001 ◽  
Vol 80-81 ◽  
pp. 361-366 ◽  
Author(s):  
Pere Roca i Cabarrocas ◽  
Surendra Kumar ◽  
V. Tripathi ◽  
P. Bulkin ◽  
R. Brenot ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Low Temperature Plasma ◽  
Microcrystalline Silicon ◽  
Large Area ◽  
Temperature Plasma ◽  
Silicon Thin Films ◽  
Large Area Electronics

scholarly journals Fabrication of intrinsic microcrystalline silicon thin films used for solar cells and its structure

2005 ◽  
Vol 54 (10) ◽  
pp. 4874
Author(s):  
Zhang Xiao-Dan ◽  
Zhao Ying ◽  
Gao Yang-Tao ◽  
Zhu Feng ◽  
Wei Chang-Chun ◽  
...  
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Deposition of microcrystalline silicon thin films for solar cells by VHF-PECVD

2004 ◽  
Author(s):  
Xiaodan Zhang ◽  
Ying Zhao ◽  
Feng Zhu ◽  
Yaohua Mai ◽  
Changchun Wei ◽  
...  
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

The effect of initial discharge conditions on the properties of microcrystalline silicon thin films and solar cells

2010 ◽  
Vol 19 (5) ◽  
pp. 057205 ◽  
Author(s):  
Chen Yong-Sheng ◽  
Yang Shi-E ◽  
Wang Jian-Hua ◽  
Lu Jing-Xiao ◽  
Gao Xiao-Yong ◽  
...  
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films ◽  
Initial Discharge
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