Research on Process Parameters Intellectual Decision Support System for High Efficiency and Precision CMP Function Ceramics

Based on the hybrid combination of case-based reasoning and BP-neural network, process parameters intellectual decision strategy of function ceramics with high efficiency and precision chemical mechanical polishing (CMP) was proposed in this paper firstly. And then, referring to the technical manuals, experiences of engineering workers and experimental data, the process parameters database for function ceramics in CMP has been built with Microsoft software Access. On the basis of the above efforts, the process parameters intellectual decision support system for high efficiency and precision CMP of function ceramics has been developed by applying PowerBuilder software, which can realize the process parameters optimization, the surface roughness prediction and process parameters intellectual decision. Examples show that the prediction results are coincident with the experiments well.