RF Characteristics of SiO2/HfO2/SiO2 MIM Capacitor

2013 ◽  
Vol 658 ◽  
pp. 112-115
Author(s):  
Hyuk Min Kwon ◽  
Sung Kyu Kwon ◽  
Woon Il Choi ◽  
Seung Yong Sung ◽  
Jong Kwan Shin ◽  
...  

RF characteristics of metal-insulator-metal (MIM) capacitors with SiO2/HfO2/SiO2 (SHS) were investigated using an equivalent circuit model that is associated with the main impedance ZMIM.cap and the substrate-related conductance Ysub. However, the parasitic capacitance in Ysub was lower than that of another element component in ZMIM.cap, which makes difficult for accurate RF modeling because the parasitic component was dominant at high frequency regions. As low parasitic component is eliminated from the modeling, the extracted capacitance for SHS MIM capacitor was stable up to 20 GHz. The Q-factor and resonant frequency (fr) point of SHS structure are 23.9 at 1 GHz and 9.76 GHz, respectively.

2021 ◽  
Vol 11 (10) ◽  
pp. 4631
Author(s):  
Yu Chen ◽  
Xiaoqing Ji ◽  
Zhongyong Zhao

The accurate establishment of the equivalent circuit model of the synchronous machine windings’ broadband characteristics is the basis for the study of high-frequency machine problems, such as winding fault diagnosis and electromagnetic interference prediction. Therefore, this paper proposes a modeling method for synchronous machine winding based on broadband characteristics. Firstly, the single-phase high-frequency lumped parameter circuit model of synchronous machine winding is introduced, then the broadband characteristics of the port are analyzed by using the state space model, and then the equivalent circuit parameters are identified by using an optimization algorithm combined with the measured broadband impedance characteristics of port. Finally, experimental verification and comparison experiments are carried out on a 5-kW synchronous machine. The experimental results show that the proposed modeling method identifies the impedance curve of the circuit parameters with a high degree of agreement with the measured impedance curve, which indicates that the modeling method is feasible. In addition, the comparative experimental results show that, compared with the engineering exploratory calculation method, the proposed parameter identification method has stronger adaptability to the measured data and a certain robustness. Compared with the black box model, the parameters of the proposed model have a certain physical meaning, and the agreement with the actual impedance characteristic curve is higher than that of the black box model.


1990 ◽  
Vol 38 (4) ◽  
pp. 1019-1021 ◽  
Author(s):  
Tamotsu KOIZUMI ◽  
Masawa KAKEMI ◽  
Kazunori KATAYAMA ◽  
Hirohiko INADA ◽  
Kazuyoshi SUDEJI ◽  
...  

1995 ◽  
Author(s):  
Giancarlo Bartolucci ◽  
Franco Giannini ◽  
Ernesto Limiti ◽  
S P Marsh

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