Influence of the Gas Phase Composition on Nanocrystalline Diamond Films Prepared by MWCVD
2005 ◽
Vol 23
◽
pp. 31-34
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Keyword(s):
Nanocrystalline diamond (NCD) films have been prepared by microwave plasma chemical vapor deposition (MWCVD) from methane/nitrogen mixtures, and the influence of the gas phase composition on the basic properties of the films (composition, morphology, topography, crystallinity and bonding structure) was investigated.
2001 ◽
Vol 10
(9-10)
◽
pp. 1592-1596
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2001 ◽
Vol 10
(3-7)
◽
pp. 352-357
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2009 ◽
Vol 311
(8)
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pp. 2258-2264
◽
2001 ◽
Vol 1
(3)
◽
pp. 287-290
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2000 ◽
Vol 9
(7)
◽
pp. 1331-1335
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2018 ◽
Vol 08
(04)
◽
pp. 157-176
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