Synthesis and structural characterization of highly 〈100〉-oriented {100}-faceted nanocrystalline diamond films by microwave plasma chemical vapor deposition

2009 ◽  
Vol 311 (8) ◽  
pp. 2258-2264 ◽  
Author(s):  
C.J. Tang ◽  
S.M.S. Pereira ◽  
A.J.S. Fernandes ◽  
A.J. Neves ◽  
J. Grácio ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Structural Characterization ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Nanocrystalline Diamond ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition

NANOCRYSTALLINE DIAMOND FILMS ON HIGH SPEED STEEL BY MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION

2005 ◽  
Vol 04 (02) ◽  
pp. 213-227
Author(s):  
VITTAYA AMORNKITBAMRUNG ◽  
THANUSIT BURINPRAKHON ◽  
WIRAT JARERNBOON
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Speed ◽  
Microwave Plasma ◽  
Diamond Films ◽  
High Speed Steel ◽  
Chemical Vapor ◽  
Nanocrystalline Diamond ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition

Nanocrystalline diamond films were deposited on high speed steel substrates by microwave plasma chemical vapor deposition. The best hardness improvement was about 130% of the substrate hardness, using -150 V substrate bias deposition conditions. Raman peaks of nanocrystalline diamond at 1190 cm-1 and of graphite nanoclusters at 1522 cm-1 wereobserved in this sample. Scanning electron microscope images show crystallite grains of different sizes between 25–250 nm.

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