Development of Phase Shifting Device Using the Deflection of a Cantilever for Digital Holography

Phase-shifting digital holography can be used for displacement measurement instead of strain gauge. Our research group is developing the measurement equipment for phase-shifting digital holography. Generally, in the measurement equipment, piezo stages are used as phaseshifting devices. But the piezo stage is expensive. Cheaper and smaller phase-shifting device is required in order to put the measurement equipment into practical use. In this paper, we, therefore, propose a phase-shifting device using the deflection of a cantilever and we verify whether this phase-shifting device can be usedfor digital holography.