An Electromechanical Tunable Grating on Silicon-on-Insulator Platform

2014 ◽  
Vol 609-610 ◽  
pp. 1277-1282
Author(s):  
Xu Min Gao ◽  
Zheng Shi ◽  
Xin Li ◽  
Shu Min He ◽  
Hong Bo Zhu ◽  
...  
Keyword(s):  
Grating Period ◽  
Wet Etching ◽  
Silicon On Insulator ◽  
Device Layer ◽  
Wave Analysis ◽  
Deep Reactive Ion Etching ◽  
Rigorous Coupled Wave Analysis ◽  
Optical Responses ◽  
Rigorous Coupled Wave ◽  
Silicon Device

We report here the design and fabrication of an electromechanical tunable grating on silicon-on-insulator (SOI) wafer. The tunable grating consists of a submicron electrostatic comb actuator and an expandable freestanding grating. Rigorous coupled-wave analysis (RCWA) method is utilized to analyze the optical responses of freestanding grating with different periods and filling factors. Obvious shift of the resonant peaks is obtained by changing the grating period and the grating filling factor. The electromechanical tunable grating is realized on the silicon device layer by a combination of electron beam (EB) lithography, deep reactive ion etching (DRIE) and wet etching. Scanning electron microscope (SEM) micrographs indicate that the grating is well fabricated. Via applying biased voltage, the force generated by the electrostatic comb actuator can modulate periods and filling factors of the freestanding grating. The electromechanical tunable grating with simple fabrication process shows bright prospects for optical telecoms and miniaturized spectrometers.

Encapsulated grating for three-port beam splitter in reflection

2016 ◽  
Vol 30 (06) ◽  
pp. 1650070 ◽  
Author(s):  
Wenhao Shu ◽  
Bo Wang ◽  
Hongtao Li ◽  
Liang Lei ◽  
Li Chen ◽  
...  
Keyword(s):  
Beam Splitter ◽  
High Efficiency ◽  
Normal Incidence ◽  
Grating Period ◽  
Practical Application ◽  
Wave Analysis ◽  
Incident Wavelength ◽  
Rigorous Coupled Wave Analysis ◽  
Rigorous Coupled Wave ◽  
Independent Property

An encapsulated grating with a metal slab is designed as a reflection three-port beam splitter at the wavelength of 1550 nm under normal incidence. Such a new grating is aimed to separate energies into the ±1st and the 0th orders for both TE and TM polarizations. The grating parameters such as grating period, duty cycle and grating depth are optimized by using rigorous coupled-wave analysis. Based on optimized grating parameters, efficiencies can reach more than 32% with the polarization-independent property. It indicates that reflection three-port beam splitter with high efficiency can be obtained by the encapsulated grating. Moreover, the presented reflection three-port grating has advantages of wide incident wavelength range and angular bandwidth, which would be useful in practical application.

Rigorous Coupled Wave Analysis of Surface Plasmon Resonance Sensor Based on Metallic Grating

2011 ◽  
Vol 211-212 ◽  
pp. 465-468
Author(s):  
De Wei Chen
Keyword(s):  
Surface Plasmon Resonance ◽  
Surface Plasmon ◽  
Plasmon Resonance ◽  
Diffraction Order ◽  
Wave Analysis ◽  
Metallic Grating ◽  
Rigorous Coupled Wave Analysis ◽  
Resonance Sensor ◽  
Rigorous Coupled Wave ◽  
Coupled Wave

Since the development almost a decade ago of the first biosensor based on surface plasmon resonance (SPR), the use of this technique has increased steadily. In this study, we theoretically investigated the sensing character of SPR sensor with reflection type metallic with Rigorous Coupled Wave Analysis (RCWA) method, and the mechanism is analyzed by the field distribution. It is found that the sensitivity of negative diffraction order, which goes higher quickly as the resonant angle increases, is much greater than that of positive diffraction order.

scholarly journals Three-Method Hybrid Numerical Simulation for Surface-Plasmon-Enhanced GaInN-Based Light-Emitting Diodes with Metal-Embedded Nanostructures

2021 ◽  
Vol 9 ◽  
Author(s):  
Ryoya Hiramatsu ◽  
Ryo Takahashi ◽  
Ryoto Fujiki ◽  
Keisuke Hozo ◽  
Kanato Sawai ◽  
...  
Keyword(s):  
Numerical Simulation ◽  
Light Emitting Diodes ◽  
Simulation Tool ◽  
Wave Analysis ◽  
Light Emitting ◽  
Rigorous Coupled Wave Analysis ◽  
Physical Background ◽  
Simulation Results ◽  
Rigorous Coupled Wave ◽  
Difference Time

In this paper, a hybrid numerical simulation tool is introduced and performed for GaInN-based light-emitting diodes (LEDs) with metal-embedded nanostructure to theoretically predict external quantum efficiency (EQE), which composed of finite-difference time-domain, rigorous coupled wave analysis, and ray tracing. The advantage is that the proposed method provides results supported by sufficient physical background within a reasonable calculation time. From the simulation results, the EQE of LED with Ag-nanoparticles embedded nanostructure is expected to be enhanced by as high as ∼1.6 times the conventional LED device in theory.

Study of Top Triangular Nano-Grating on Solar Cell Using Rigorous Coupled Wave Analysis

2012 ◽  
Vol 571 ◽  
pp. 427-432 ◽  
Author(s):  
Xiao Min Jin ◽  
Douglas Alan Cattarusa ◽  
Michael James Marshall
Keyword(s):  
Solar Cell ◽  
Wave Analysis ◽  
Total Transmission ◽  
Rigorous Coupled Wave Analysis ◽  
Simulation Results ◽  
Rigorous Coupled Wave ◽  
Coupled Wave

This paper presents the simulation results of top nano-grating on solar cell using rigorous coupled wave analysis (RCWA) method. However, compared to other simulation results, we calculated weighted total transmission of solar cell according to Sun spectrum and Silicon photo detector responsivity. Our optimization shows that the top grating with period 200nm, width 40nm, and height 150nm is the optimization structure. This case has 0.45544 total weighted transmission powers and is about 70.9% improvement compared to the non-grating case.

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